2/16/2012	12:10:27 AM	Helium valve closed
2/16/2012	12:10:27 AM	H2 valve closed
2/16/2012	12:10:27 AM	BCl3 valve closed
2/16/2012	12:10:27 AM	PH3 valve closed
2/16/2012	12:10:27 AM	SiCl4 pre valve closed
2/16/2012	12:10:27 AM	SiCl4 post valve closed
2/16/2012	12:10:27 AM	Main Vac valve closed
2/16/2012	12:10:27 AM	Bypass valve closed
2/16/2012	12:10:27 AM	Bubbler valve closed
2/16/2012	12:10:27 AM	Helium MFC set to  0.000000
2/16/2012	12:10:27 AM	H2 MFC set to  0.000000
2/16/2012	12:10:27 AM	BCl3 MFC set to  0.000000
2/16/2012	12:10:27 AM	PH3 MFC set to  0.000000
2/16/2012	12:10:27 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:10:27 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:10:27 AM	Tube furnace set to 0
2/16/2012	12:10:28 AM	Run finished at 12:10 AM
2/16/2012	12:10:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	12:10:37 AM	Recipe started at 12:10 AM
2/16/2012	12:10:37 AM	Helium valve closed
2/16/2012	12:10:37 AM	H2 valve closed
2/16/2012	12:10:37 AM	BCl3 valve closed
2/16/2012	12:10:37 AM	PH3 valve closed
2/16/2012	12:10:37 AM	SiCl4 pre valve closed
2/16/2012	12:10:37 AM	SiCl4 post valve closed
2/16/2012	12:10:37 AM	Main Vac valve closed
2/16/2012	12:10:37 AM	Bypass valve closed
2/16/2012	12:10:37 AM	Bubbler valve closed
2/16/2012	12:10:37 AM	Helium MFC set to  0.000000
2/16/2012	12:10:37 AM	H2 MFC set to  0.000000
2/16/2012	12:10:37 AM	BCl3 MFC set to  0.000000
2/16/2012	12:10:37 AM	PH3 MFC set to  0.000000
2/16/2012	12:10:37 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:10:37 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:10:37 AM	Tube furnace set to 0
2/16/2012	12:10:40 AM	H2 valve closed
2/16/2012	12:10:40 AM	BCl3 valve closed
2/16/2012	12:10:40 AM	PH3 valve closed
2/16/2012	12:10:40 AM	SiCl4 pre valve closed
2/16/2012	12:10:40 AM	SiCl4 post valve closed
2/16/2012	12:10:40 AM	Main Vac valve closed
2/16/2012	12:10:40 AM	Bypass valve closed
2/16/2012	12:10:40 AM	Bubbler valve closed
2/16/2012	12:10:40 AM	Helium valve opened
2/16/2012	12:10:40 AM	Helium MFC set to  500.000000
2/16/2012	12:10:40 AM	H2 MFC set to  0.000000
2/16/2012	12:10:40 AM	BCl3 MFC set to  0.000000
2/16/2012	12:10:40 AM	PH3 MFC set to  0.000000
2/16/2012	12:10:40 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:10:40 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:10:40 AM	Tube furnace set to 0
2/16/2012	12:10:41 AM	Helium valve closed
2/16/2012	12:10:41 AM	H2 valve closed
2/16/2012	12:10:41 AM	BCl3 valve closed
2/16/2012	12:10:41 AM	PH3 valve closed
2/16/2012	12:10:41 AM	SiCl4 pre valve closed
2/16/2012	12:10:41 AM	SiCl4 post valve closed
2/16/2012	12:10:41 AM	Main Vac valve closed
2/16/2012	12:10:41 AM	Bypass valve closed
2/16/2012	12:10:41 AM	Bubbler valve closed
2/16/2012	12:10:41 AM	Helium MFC set to  0.000000
2/16/2012	12:10:41 AM	H2 MFC set to  0.000000
2/16/2012	12:10:41 AM	BCl3 MFC set to  0.000000
2/16/2012	12:10:41 AM	PH3 MFC set to  0.000000
2/16/2012	12:10:41 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:10:41 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:10:41 AM	Tube furnace set to 0
2/16/2012	12:10:42 AM	Run finished at 12:10 AM
2/16/2012	12:10:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	12:13:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	12:13:55 AM	Recipe started at 12:13 AM
2/16/2012	12:13:55 AM	Helium valve closed
2/16/2012	12:13:55 AM	H2 valve closed
2/16/2012	12:13:55 AM	BCl3 valve closed
2/16/2012	12:13:55 AM	PH3 valve closed
2/16/2012	12:13:55 AM	SiCl4 pre valve closed
2/16/2012	12:13:55 AM	SiCl4 post valve closed
2/16/2012	12:13:55 AM	Main Vac valve closed
2/16/2012	12:13:55 AM	Bubbler valve closed
2/16/2012	12:13:55 AM	Bypass valve opened
2/16/2012	12:13:55 AM	Helium MFC set to  0.000000
2/16/2012	12:13:55 AM	H2 MFC set to  0.000000
2/16/2012	12:13:55 AM	BCl3 MFC set to  0.000000
2/16/2012	12:13:55 AM	PH3 MFC set to  0.000000
2/16/2012	12:13:55 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:13:55 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:13:55 AM	Tube furnace set to 0
2/16/2012	12:14:52 AM	Helium valve closed
2/16/2012	12:14:52 AM	H2 valve closed
2/16/2012	12:14:52 AM	BCl3 valve closed
2/16/2012	12:14:52 AM	PH3 valve closed
2/16/2012	12:14:52 AM	SiCl4 pre valve closed
2/16/2012	12:14:52 AM	SiCl4 post valve closed
2/16/2012	12:14:52 AM	Main Vac valve closed
2/16/2012	12:14:52 AM	Bubbler valve closed
2/16/2012	12:14:52 AM	Bypass valve opened
2/16/2012	12:14:52 AM	Helium MFC set to  0.000000
2/16/2012	12:14:52 AM	H2 MFC set to  0.000000
2/16/2012	12:14:52 AM	BCl3 MFC set to  0.000000
2/16/2012	12:14:52 AM	PH3 MFC set to  0.000000
2/16/2012	12:14:52 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:14:52 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:14:52 AM	Tube furnace set to 0
2/16/2012	12:15:52 AM	Helium valve closed
2/16/2012	12:15:52 AM	H2 valve closed
2/16/2012	12:15:52 AM	BCl3 valve closed
2/16/2012	12:15:52 AM	PH3 valve closed
2/16/2012	12:15:52 AM	SiCl4 pre valve closed
2/16/2012	12:15:52 AM	SiCl4 post valve closed
2/16/2012	12:15:52 AM	Bypass valve closed
2/16/2012	12:15:52 AM	Bubbler valve closed
2/16/2012	12:15:52 AM	Main Vac valve opened
2/16/2012	12:15:52 AM	Helium MFC set to  0.000000
2/16/2012	12:15:52 AM	H2 MFC set to  0.000000
2/16/2012	12:15:52 AM	BCl3 MFC set to  0.000000
2/16/2012	12:15:52 AM	PH3 MFC set to  0.000000
2/16/2012	12:15:52 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:15:52 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:15:52 AM	Tube furnace set to 0
2/16/2012	12:15:53 AM	Run finished at 12:15 AM
2/16/2012	12:15:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	12:24:11 AM	Recipe started at 12:24 AM
2/16/2012	12:24:11 AM	Helium valve closed
2/16/2012	12:24:11 AM	H2 valve closed
2/16/2012	12:24:11 AM	BCl3 valve closed
2/16/2012	12:24:11 AM	PH3 valve closed
2/16/2012	12:24:11 AM	SiCl4 pre valve closed
2/16/2012	12:24:11 AM	SiCl4 post valve closed
2/16/2012	12:24:11 AM	Bypass valve closed
2/16/2012	12:24:11 AM	Bubbler valve closed
2/16/2012	12:24:11 AM	Main Vac valve opened
2/16/2012	12:24:11 AM	Helium MFC set to  0.000000
2/16/2012	12:24:11 AM	H2 MFC set to  0.000000
2/16/2012	12:24:11 AM	BCl3 MFC set to  0.000000
2/16/2012	12:24:11 AM	PH3 MFC set to  0.000000
2/16/2012	12:24:11 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:24:11 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:24:12 AM	Tube furnace set to 150
2/16/2012	12:24:42 AM	H2 valve closed
2/16/2012	12:24:42 AM	BCl3 valve closed
2/16/2012	12:24:42 AM	PH3 valve closed
2/16/2012	12:24:42 AM	SiCl4 pre valve closed
2/16/2012	12:24:42 AM	SiCl4 post valve closed
2/16/2012	12:24:42 AM	Bypass valve closed
2/16/2012	12:24:42 AM	Bubbler valve closed
2/16/2012	12:24:42 AM	Helium valve opened
2/16/2012	12:24:42 AM	Main Vac valve opened
2/16/2012	12:24:42 AM	Helium MFC set to  20.000000
2/16/2012	12:24:42 AM	H2 MFC set to  0.000000
2/16/2012	12:24:42 AM	BCl3 MFC set to  0.000000
2/16/2012	12:24:42 AM	PH3 MFC set to  0.000000
2/16/2012	12:24:42 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:24:42 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:24:42 AM	Tube furnace set to 150
2/16/2012	12:25:12 AM	Helium valve closed
2/16/2012	12:25:12 AM	H2 valve closed
2/16/2012	12:25:12 AM	BCl3 valve closed
2/16/2012	12:25:12 AM	PH3 valve closed
2/16/2012	12:25:12 AM	SiCl4 pre valve closed
2/16/2012	12:25:12 AM	SiCl4 post valve closed
2/16/2012	12:25:12 AM	Bypass valve closed
2/16/2012	12:25:12 AM	Bubbler valve closed
2/16/2012	12:25:12 AM	Main Vac valve opened
2/16/2012	12:25:12 AM	Helium MFC set to  0.000000
2/16/2012	12:25:12 AM	H2 MFC set to  0.000000
2/16/2012	12:25:12 AM	BCl3 MFC set to  0.000000
2/16/2012	12:25:12 AM	PH3 MFC set to  0.000000
2/16/2012	12:25:12 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:25:12 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:25:12 AM	Tube furnace set to 150
2/16/2012	12:25:42 AM	H2 valve closed
2/16/2012	12:25:42 AM	BCl3 valve closed
2/16/2012	12:25:42 AM	PH3 valve closed
2/16/2012	12:25:42 AM	SiCl4 pre valve closed
2/16/2012	12:25:42 AM	SiCl4 post valve closed
2/16/2012	12:25:42 AM	Bypass valve closed
2/16/2012	12:25:42 AM	Bubbler valve closed
2/16/2012	12:25:42 AM	Helium valve opened
2/16/2012	12:25:42 AM	Main Vac valve opened
2/16/2012	12:25:42 AM	Helium MFC set to  20.000000
2/16/2012	12:25:42 AM	H2 MFC set to  0.000000
2/16/2012	12:25:42 AM	BCl3 MFC set to  0.000000
2/16/2012	12:25:42 AM	PH3 MFC set to  0.000000
2/16/2012	12:25:42 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:25:42 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:25:42 AM	Tube furnace set to 150
2/16/2012	12:26:12 AM	Helium valve closed
2/16/2012	12:26:12 AM	H2 valve closed
2/16/2012	12:26:12 AM	BCl3 valve closed
2/16/2012	12:26:12 AM	PH3 valve closed
2/16/2012	12:26:12 AM	SiCl4 pre valve closed
2/16/2012	12:26:12 AM	SiCl4 post valve closed
2/16/2012	12:26:12 AM	Bypass valve closed
2/16/2012	12:26:12 AM	Bubbler valve closed
2/16/2012	12:26:12 AM	Main Vac valve opened
2/16/2012	12:26:12 AM	Helium MFC set to  0.000000
2/16/2012	12:26:12 AM	H2 MFC set to  0.000000
2/16/2012	12:26:12 AM	BCl3 MFC set to  0.000000
2/16/2012	12:26:12 AM	PH3 MFC set to  0.000000
2/16/2012	12:26:12 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:26:12 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:26:12 AM	Tube furnace set to 150
2/16/2012	12:26:42 AM	H2 valve closed
2/16/2012	12:26:42 AM	BCl3 valve closed
2/16/2012	12:26:42 AM	PH3 valve closed
2/16/2012	12:26:42 AM	SiCl4 pre valve closed
2/16/2012	12:26:42 AM	SiCl4 post valve closed
2/16/2012	12:26:42 AM	Bypass valve closed
2/16/2012	12:26:43 AM	Bubbler valve closed
2/16/2012	12:26:43 AM	Helium valve opened
2/16/2012	12:26:43 AM	Main Vac valve opened
2/16/2012	12:26:43 AM	Helium MFC set to  20.000000
2/16/2012	12:26:43 AM	H2 MFC set to  0.000000
2/16/2012	12:26:43 AM	BCl3 MFC set to  0.000000
2/16/2012	12:26:43 AM	PH3 MFC set to  0.000000
2/16/2012	12:26:43 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:26:43 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:26:43 AM	Tube furnace set to 150
2/16/2012	12:27:13 AM	Helium valve closed
2/16/2012	12:27:13 AM	H2 valve closed
2/16/2012	12:27:13 AM	BCl3 valve closed
2/16/2012	12:27:13 AM	PH3 valve closed
2/16/2012	12:27:13 AM	SiCl4 pre valve closed
2/16/2012	12:27:13 AM	SiCl4 post valve closed
2/16/2012	12:27:13 AM	Bypass valve closed
2/16/2012	12:27:13 AM	Bubbler valve closed
2/16/2012	12:27:13 AM	Main Vac valve opened
2/16/2012	12:27:13 AM	Helium MFC set to  0.000000
2/16/2012	12:27:13 AM	H2 MFC set to  0.000000
2/16/2012	12:27:13 AM	BCl3 MFC set to  0.000000
2/16/2012	12:27:13 AM	PH3 MFC set to  0.000000
2/16/2012	12:27:13 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:27:13 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:27:13 AM	Tube furnace set to 150
2/16/2012	12:27:43 AM	H2 valve closed
2/16/2012	12:27:43 AM	BCl3 valve closed
2/16/2012	12:27:43 AM	PH3 valve closed
2/16/2012	12:27:43 AM	SiCl4 pre valve closed
2/16/2012	12:27:43 AM	SiCl4 post valve closed
2/16/2012	12:27:43 AM	Bypass valve closed
2/16/2012	12:27:43 AM	Bubbler valve closed
2/16/2012	12:27:43 AM	Helium valve opened
2/16/2012	12:27:43 AM	Main Vac valve opened
2/16/2012	12:27:43 AM	Helium MFC set to  20.000000
2/16/2012	12:27:43 AM	H2 MFC set to  0.000000
2/16/2012	12:27:43 AM	BCl3 MFC set to  0.000000
2/16/2012	12:27:43 AM	PH3 MFC set to  0.000000
2/16/2012	12:27:43 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:27:43 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:27:43 AM	Tube furnace set to 150
2/16/2012	12:28:13 AM	Helium valve closed
2/16/2012	12:28:13 AM	H2 valve closed
2/16/2012	12:28:13 AM	BCl3 valve closed
2/16/2012	12:28:13 AM	PH3 valve closed
2/16/2012	12:28:13 AM	SiCl4 pre valve closed
2/16/2012	12:28:13 AM	SiCl4 post valve closed
2/16/2012	12:28:13 AM	Bypass valve closed
2/16/2012	12:28:13 AM	Bubbler valve closed
2/16/2012	12:28:13 AM	Main Vac valve opened
2/16/2012	12:28:13 AM	Helium MFC set to  0.000000
2/16/2012	12:28:13 AM	H2 MFC set to  0.000000
2/16/2012	12:28:13 AM	BCl3 MFC set to  0.000000
2/16/2012	12:28:13 AM	PH3 MFC set to  0.000000
2/16/2012	12:28:13 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:28:13 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:28:13 AM	Tube furnace set to 150
2/16/2012	12:28:43 AM	H2 valve closed
2/16/2012	12:28:43 AM	BCl3 valve closed
2/16/2012	12:28:43 AM	PH3 valve closed
2/16/2012	12:28:43 AM	SiCl4 pre valve closed
2/16/2012	12:28:43 AM	SiCl4 post valve closed
2/16/2012	12:28:43 AM	Bypass valve closed
2/16/2012	12:28:43 AM	Bubbler valve closed
2/16/2012	12:28:43 AM	Helium valve opened
2/16/2012	12:28:43 AM	Main Vac valve opened
2/16/2012	12:28:43 AM	Helium MFC set to  20.000000
2/16/2012	12:28:43 AM	H2 MFC set to  0.000000
2/16/2012	12:28:43 AM	BCl3 MFC set to  0.000000
2/16/2012	12:28:43 AM	PH3 MFC set to  0.000000
2/16/2012	12:28:43 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:28:43 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:28:43 AM	Tube furnace set to 150
2/16/2012	12:29:14 AM	Helium valve closed
2/16/2012	12:29:14 AM	H2 valve closed
2/16/2012	12:29:14 AM	BCl3 valve closed
2/16/2012	12:29:14 AM	PH3 valve closed
2/16/2012	12:29:14 AM	SiCl4 pre valve closed
2/16/2012	12:29:14 AM	SiCl4 post valve closed
2/16/2012	12:29:14 AM	Bypass valve closed
2/16/2012	12:29:14 AM	Bubbler valve closed
2/16/2012	12:29:14 AM	Main Vac valve opened
2/16/2012	12:29:14 AM	Helium MFC set to  0.000000
2/16/2012	12:29:14 AM	H2 MFC set to  0.000000
2/16/2012	12:29:14 AM	BCl3 MFC set to  0.000000
2/16/2012	12:29:14 AM	PH3 MFC set to  0.000000
2/16/2012	12:29:14 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:29:14 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:29:14 AM	Tube furnace set to 150
2/16/2012	12:29:44 AM	H2 valve closed
2/16/2012	12:29:44 AM	BCl3 valve closed
2/16/2012	12:29:44 AM	PH3 valve closed
2/16/2012	12:29:44 AM	SiCl4 pre valve closed
2/16/2012	12:29:44 AM	SiCl4 post valve closed
2/16/2012	12:29:44 AM	Bypass valve closed
2/16/2012	12:29:44 AM	Bubbler valve closed
2/16/2012	12:29:44 AM	Helium valve opened
2/16/2012	12:29:44 AM	Main Vac valve opened
2/16/2012	12:29:44 AM	Helium MFC set to  20.000000
2/16/2012	12:29:44 AM	H2 MFC set to  0.000000
2/16/2012	12:29:44 AM	BCl3 MFC set to  0.000000
2/16/2012	12:29:44 AM	PH3 MFC set to  0.000000
2/16/2012	12:29:44 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:29:44 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:29:44 AM	Tube furnace set to 150
2/16/2012	12:30:14 AM	Helium valve closed
2/16/2012	12:30:14 AM	H2 valve closed
2/16/2012	12:30:14 AM	BCl3 valve closed
2/16/2012	12:30:14 AM	PH3 valve closed
2/16/2012	12:30:14 AM	SiCl4 pre valve closed
2/16/2012	12:30:14 AM	SiCl4 post valve closed
2/16/2012	12:30:14 AM	Bypass valve closed
2/16/2012	12:30:14 AM	Bubbler valve closed
2/16/2012	12:30:14 AM	Main Vac valve opened
2/16/2012	12:30:14 AM	Helium MFC set to  0.000000
2/16/2012	12:30:14 AM	H2 MFC set to  0.000000
2/16/2012	12:30:14 AM	BCl3 MFC set to  0.000000
2/16/2012	12:30:14 AM	PH3 MFC set to  0.000000
2/16/2012	12:30:14 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:30:14 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:30:14 AM	Tube furnace set to 150
2/16/2012	12:30:44 AM	H2 valve closed
2/16/2012	12:30:44 AM	BCl3 valve closed
2/16/2012	12:30:44 AM	PH3 valve closed
2/16/2012	12:30:44 AM	SiCl4 pre valve closed
2/16/2012	12:30:44 AM	SiCl4 post valve closed
2/16/2012	12:30:44 AM	Bypass valve closed
2/16/2012	12:30:44 AM	Bubbler valve closed
2/16/2012	12:30:44 AM	Helium valve opened
2/16/2012	12:30:44 AM	Main Vac valve opened
2/16/2012	12:30:44 AM	Helium MFC set to  20.000000
2/16/2012	12:30:44 AM	H2 MFC set to  0.000000
2/16/2012	12:30:44 AM	BCl3 MFC set to  0.000000
2/16/2012	12:30:44 AM	PH3 MFC set to  0.000000
2/16/2012	12:30:44 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:30:44 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:30:44 AM	Tube furnace set to 150
2/16/2012	12:31:14 AM	Helium valve closed
2/16/2012	12:31:14 AM	H2 valve closed
2/16/2012	12:31:14 AM	BCl3 valve closed
2/16/2012	12:31:14 AM	PH3 valve closed
2/16/2012	12:31:14 AM	SiCl4 pre valve closed
2/16/2012	12:31:14 AM	SiCl4 post valve closed
2/16/2012	12:31:14 AM	Bypass valve closed
2/16/2012	12:31:14 AM	Bubbler valve closed
2/16/2012	12:31:14 AM	Main Vac valve opened
2/16/2012	12:31:14 AM	Helium MFC set to  0.000000
2/16/2012	12:31:14 AM	H2 MFC set to  0.000000
2/16/2012	12:31:14 AM	BCl3 MFC set to  0.000000
2/16/2012	12:31:14 AM	PH3 MFC set to  0.000000
2/16/2012	12:31:14 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:31:14 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:31:15 AM	Tube furnace set to 150
2/16/2012	12:31:45 AM	H2 valve closed
2/16/2012	12:31:45 AM	BCl3 valve closed
2/16/2012	12:31:45 AM	PH3 valve closed
2/16/2012	12:31:45 AM	SiCl4 pre valve closed
2/16/2012	12:31:45 AM	SiCl4 post valve closed
2/16/2012	12:31:45 AM	Bypass valve closed
2/16/2012	12:31:45 AM	Bubbler valve closed
2/16/2012	12:31:45 AM	Helium valve opened
2/16/2012	12:31:45 AM	Main Vac valve opened
2/16/2012	12:31:45 AM	Helium MFC set to  20.000000
2/16/2012	12:31:45 AM	H2 MFC set to  0.000000
2/16/2012	12:31:45 AM	BCl3 MFC set to  0.000000
2/16/2012	12:31:45 AM	PH3 MFC set to  0.000000
2/16/2012	12:31:45 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:31:45 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:31:45 AM	Tube furnace set to 150
2/16/2012	12:32:15 AM	Helium valve closed
2/16/2012	12:32:15 AM	H2 valve closed
2/16/2012	12:32:15 AM	BCl3 valve closed
2/16/2012	12:32:15 AM	PH3 valve closed
2/16/2012	12:32:15 AM	SiCl4 pre valve closed
2/16/2012	12:32:15 AM	SiCl4 post valve closed
2/16/2012	12:32:15 AM	Bypass valve closed
2/16/2012	12:32:15 AM	Bubbler valve closed
2/16/2012	12:32:15 AM	Main Vac valve opened
2/16/2012	12:32:15 AM	Helium MFC set to  0.000000
2/16/2012	12:32:15 AM	H2 MFC set to  0.000000
2/16/2012	12:32:15 AM	BCl3 MFC set to  0.000000
2/16/2012	12:32:15 AM	PH3 MFC set to  0.000000
2/16/2012	12:32:15 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:32:15 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:32:15 AM	Tube furnace set to 150
2/16/2012	12:32:45 AM	H2 valve closed
2/16/2012	12:32:45 AM	BCl3 valve closed
2/16/2012	12:32:45 AM	PH3 valve closed
2/16/2012	12:32:45 AM	SiCl4 pre valve closed
2/16/2012	12:32:45 AM	SiCl4 post valve closed
2/16/2012	12:32:45 AM	Bypass valve closed
2/16/2012	12:32:45 AM	Bubbler valve closed
2/16/2012	12:32:45 AM	Helium valve opened
2/16/2012	12:32:45 AM	Main Vac valve opened
2/16/2012	12:32:45 AM	Helium MFC set to  20.000000
2/16/2012	12:32:45 AM	H2 MFC set to  0.000000
2/16/2012	12:32:45 AM	BCl3 MFC set to  0.000000
2/16/2012	12:32:45 AM	PH3 MFC set to  0.000000
2/16/2012	12:32:45 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:32:45 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:32:45 AM	Tube furnace set to 150
2/16/2012	12:33:15 AM	Helium valve closed
2/16/2012	12:33:15 AM	H2 valve closed
2/16/2012	12:33:15 AM	BCl3 valve closed
2/16/2012	12:33:15 AM	PH3 valve closed
2/16/2012	12:33:15 AM	SiCl4 pre valve closed
2/16/2012	12:33:15 AM	SiCl4 post valve closed
2/16/2012	12:33:15 AM	Bypass valve closed
2/16/2012	12:33:15 AM	Bubbler valve closed
2/16/2012	12:33:15 AM	Main Vac valve opened
2/16/2012	12:33:15 AM	Helium MFC set to  0.000000
2/16/2012	12:33:15 AM	H2 MFC set to  0.000000
2/16/2012	12:33:15 AM	BCl3 MFC set to  0.000000
2/16/2012	12:33:15 AM	PH3 MFC set to  0.000000
2/16/2012	12:33:15 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:33:15 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:33:15 AM	Tube furnace set to 150
2/16/2012	12:33:45 AM	H2 valve closed
2/16/2012	12:33:45 AM	BCl3 valve closed
2/16/2012	12:33:45 AM	PH3 valve closed
2/16/2012	12:33:45 AM	SiCl4 pre valve closed
2/16/2012	12:33:45 AM	SiCl4 post valve closed
2/16/2012	12:33:45 AM	Bypass valve closed
2/16/2012	12:33:45 AM	Bubbler valve closed
2/16/2012	12:33:45 AM	Helium valve opened
2/16/2012	12:33:45 AM	Main Vac valve opened
2/16/2012	12:33:45 AM	Helium MFC set to  20.000000
2/16/2012	12:33:45 AM	H2 MFC set to  0.000000
2/16/2012	12:33:45 AM	BCl3 MFC set to  0.000000
2/16/2012	12:33:45 AM	PH3 MFC set to  0.000000
2/16/2012	12:33:45 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:33:45 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:33:46 AM	Tube furnace set to 150
2/16/2012	12:34:16 AM	Helium valve closed
2/16/2012	12:34:16 AM	H2 valve closed
2/16/2012	12:34:16 AM	BCl3 valve closed
2/16/2012	12:34:16 AM	PH3 valve closed
2/16/2012	12:34:16 AM	SiCl4 pre valve closed
2/16/2012	12:34:16 AM	SiCl4 post valve closed
2/16/2012	12:34:16 AM	Bypass valve closed
2/16/2012	12:34:16 AM	Bubbler valve closed
2/16/2012	12:34:16 AM	Main Vac valve opened
2/16/2012	12:34:16 AM	Helium MFC set to  0.000000
2/16/2012	12:34:16 AM	H2 MFC set to  0.000000
2/16/2012	12:34:16 AM	BCl3 MFC set to  0.000000
2/16/2012	12:34:16 AM	PH3 MFC set to  0.000000
2/16/2012	12:34:16 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:34:16 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:34:16 AM	Tube furnace set to 150
2/16/2012	12:34:17 AM	Run finished at 12:34 AM
2/16/2012	12:34:49 AM	Recipe started at 12:34 AM
2/16/2012	12:34:49 AM	Helium valve closed
2/16/2012	12:34:49 AM	H2 valve closed
2/16/2012	12:34:49 AM	BCl3 valve closed
2/16/2012	12:34:49 AM	PH3 valve closed
2/16/2012	12:34:49 AM	SiCl4 pre valve closed
2/16/2012	12:34:49 AM	SiCl4 post valve closed
2/16/2012	12:34:49 AM	Bypass valve closed
2/16/2012	12:34:49 AM	Bubbler valve closed
2/16/2012	12:34:49 AM	Main Vac valve opened
2/16/2012	12:34:49 AM	Helium MFC set to  0.000000
2/16/2012	12:34:49 AM	H2 MFC set to  0.000000
2/16/2012	12:34:49 AM	BCl3 MFC set to  0.000000
2/16/2012	12:34:49 AM	PH3 MFC set to  0.000000
2/16/2012	12:34:49 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:34:49 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:34:49 AM	Tube furnace set to 150
2/16/2012	12:35:19 AM	H2 valve closed
2/16/2012	12:35:19 AM	BCl3 valve closed
2/16/2012	12:35:19 AM	PH3 valve closed
2/16/2012	12:35:19 AM	SiCl4 pre valve closed
2/16/2012	12:35:19 AM	SiCl4 post valve closed
2/16/2012	12:35:19 AM	Bypass valve closed
2/16/2012	12:35:19 AM	Bubbler valve closed
2/16/2012	12:35:19 AM	Helium valve opened
2/16/2012	12:35:19 AM	Main Vac valve opened
2/16/2012	12:35:19 AM	Helium MFC set to  20.000000
2/16/2012	12:35:19 AM	H2 MFC set to  0.000000
2/16/2012	12:35:19 AM	BCl3 MFC set to  0.000000
2/16/2012	12:35:19 AM	PH3 MFC set to  0.000000
2/16/2012	12:35:19 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:35:19 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:35:19 AM	Tube furnace set to 150
2/16/2012	12:35:49 AM	Helium valve closed
2/16/2012	12:35:49 AM	H2 valve closed
2/16/2012	12:35:49 AM	BCl3 valve closed
2/16/2012	12:35:49 AM	PH3 valve closed
2/16/2012	12:35:49 AM	SiCl4 pre valve closed
2/16/2012	12:35:49 AM	SiCl4 post valve closed
2/16/2012	12:35:49 AM	Bypass valve closed
2/16/2012	12:35:49 AM	Bubbler valve closed
2/16/2012	12:35:49 AM	Main Vac valve opened
2/16/2012	12:35:49 AM	Helium MFC set to  0.000000
2/16/2012	12:35:49 AM	H2 MFC set to  0.000000
2/16/2012	12:35:49 AM	BCl3 MFC set to  0.000000
2/16/2012	12:35:49 AM	PH3 MFC set to  0.000000
2/16/2012	12:35:49 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:35:49 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:35:49 AM	Tube furnace set to 150
2/16/2012	12:36:19 AM	H2 valve closed
2/16/2012	12:36:19 AM	BCl3 valve closed
2/16/2012	12:36:19 AM	PH3 valve closed
2/16/2012	12:36:19 AM	SiCl4 pre valve closed
2/16/2012	12:36:19 AM	SiCl4 post valve closed
2/16/2012	12:36:19 AM	Bypass valve closed
2/16/2012	12:36:19 AM	Bubbler valve closed
2/16/2012	12:36:19 AM	Helium valve opened
2/16/2012	12:36:19 AM	Main Vac valve opened
2/16/2012	12:36:19 AM	Helium MFC set to  20.000000
2/16/2012	12:36:19 AM	H2 MFC set to  0.000000
2/16/2012	12:36:19 AM	BCl3 MFC set to  0.000000
2/16/2012	12:36:19 AM	PH3 MFC set to  0.000000
2/16/2012	12:36:19 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:36:19 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:36:20 AM	Tube furnace set to 150
2/16/2012	12:36:50 AM	Helium valve closed
2/16/2012	12:36:50 AM	H2 valve closed
2/16/2012	12:36:50 AM	BCl3 valve closed
2/16/2012	12:36:50 AM	PH3 valve closed
2/16/2012	12:36:50 AM	SiCl4 pre valve closed
2/16/2012	12:36:50 AM	SiCl4 post valve closed
2/16/2012	12:36:50 AM	Bypass valve closed
2/16/2012	12:36:50 AM	Bubbler valve closed
2/16/2012	12:36:50 AM	Main Vac valve opened
2/16/2012	12:36:50 AM	Helium MFC set to  0.000000
2/16/2012	12:36:50 AM	H2 MFC set to  0.000000
2/16/2012	12:36:50 AM	BCl3 MFC set to  0.000000
2/16/2012	12:36:50 AM	PH3 MFC set to  0.000000
2/16/2012	12:36:50 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:36:50 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:36:50 AM	Tube furnace set to 150
2/16/2012	12:37:20 AM	H2 valve closed
2/16/2012	12:37:20 AM	BCl3 valve closed
2/16/2012	12:37:20 AM	PH3 valve closed
2/16/2012	12:37:20 AM	SiCl4 pre valve closed
2/16/2012	12:37:20 AM	SiCl4 post valve closed
2/16/2012	12:37:20 AM	Bypass valve closed
2/16/2012	12:37:20 AM	Bubbler valve closed
2/16/2012	12:37:20 AM	Helium valve opened
2/16/2012	12:37:20 AM	Main Vac valve opened
2/16/2012	12:37:20 AM	Helium MFC set to  20.000000
2/16/2012	12:37:20 AM	H2 MFC set to  0.000000
2/16/2012	12:37:20 AM	BCl3 MFC set to  0.000000
2/16/2012	12:37:20 AM	PH3 MFC set to  0.000000
2/16/2012	12:37:20 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:37:20 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:37:20 AM	Tube furnace set to 150
2/16/2012	12:37:50 AM	Helium valve closed
2/16/2012	12:37:50 AM	H2 valve closed
2/16/2012	12:37:50 AM	BCl3 valve closed
2/16/2012	12:37:50 AM	PH3 valve closed
2/16/2012	12:37:50 AM	SiCl4 pre valve closed
2/16/2012	12:37:50 AM	SiCl4 post valve closed
2/16/2012	12:37:50 AM	Bypass valve closed
2/16/2012	12:37:50 AM	Bubbler valve closed
2/16/2012	12:37:50 AM	Main Vac valve opened
2/16/2012	12:37:50 AM	Helium MFC set to  0.000000
2/16/2012	12:37:50 AM	H2 MFC set to  0.000000
2/16/2012	12:37:50 AM	BCl3 MFC set to  0.000000
2/16/2012	12:37:50 AM	PH3 MFC set to  0.000000
2/16/2012	12:37:50 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:37:50 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:37:50 AM	Tube furnace set to 150
2/16/2012	12:38:20 AM	H2 valve closed
2/16/2012	12:38:20 AM	BCl3 valve closed
2/16/2012	12:38:20 AM	PH3 valve closed
2/16/2012	12:38:20 AM	SiCl4 pre valve closed
2/16/2012	12:38:20 AM	SiCl4 post valve closed
2/16/2012	12:38:20 AM	Bypass valve closed
2/16/2012	12:38:20 AM	Bubbler valve closed
2/16/2012	12:38:20 AM	Helium valve opened
2/16/2012	12:38:20 AM	Main Vac valve opened
2/16/2012	12:38:20 AM	Helium MFC set to  20.000000
2/16/2012	12:38:20 AM	H2 MFC set to  0.000000
2/16/2012	12:38:20 AM	BCl3 MFC set to  0.000000
2/16/2012	12:38:20 AM	PH3 MFC set to  0.000000
2/16/2012	12:38:20 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:38:20 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:38:20 AM	Tube furnace set to 150
2/16/2012	12:38:50 AM	Helium valve closed
2/16/2012	12:38:50 AM	H2 valve closed
2/16/2012	12:38:50 AM	BCl3 valve closed
2/16/2012	12:38:50 AM	PH3 valve closed
2/16/2012	12:38:50 AM	SiCl4 pre valve closed
2/16/2012	12:38:50 AM	SiCl4 post valve closed
2/16/2012	12:38:50 AM	Bypass valve closed
2/16/2012	12:38:50 AM	Bubbler valve closed
2/16/2012	12:38:50 AM	Main Vac valve opened
2/16/2012	12:38:50 AM	Helium MFC set to  0.000000
2/16/2012	12:38:50 AM	H2 MFC set to  0.000000
2/16/2012	12:38:50 AM	BCl3 MFC set to  0.000000
2/16/2012	12:38:50 AM	PH3 MFC set to  0.000000
2/16/2012	12:38:50 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:38:50 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:38:51 AM	Tube furnace set to 150
2/16/2012	12:39:21 AM	H2 valve closed
2/16/2012	12:39:21 AM	BCl3 valve closed
2/16/2012	12:39:21 AM	PH3 valve closed
2/16/2012	12:39:21 AM	SiCl4 pre valve closed
2/16/2012	12:39:21 AM	SiCl4 post valve closed
2/16/2012	12:39:21 AM	Bypass valve closed
2/16/2012	12:39:21 AM	Bubbler valve closed
2/16/2012	12:39:21 AM	Helium valve opened
2/16/2012	12:39:21 AM	Main Vac valve opened
2/16/2012	12:39:21 AM	Helium MFC set to  20.000000
2/16/2012	12:39:21 AM	H2 MFC set to  0.000000
2/16/2012	12:39:21 AM	BCl3 MFC set to  0.000000
2/16/2012	12:39:21 AM	PH3 MFC set to  0.000000
2/16/2012	12:39:21 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:39:21 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:39:21 AM	Tube furnace set to 150
2/16/2012	12:39:51 AM	Helium valve closed
2/16/2012	12:39:51 AM	H2 valve closed
2/16/2012	12:39:51 AM	BCl3 valve closed
2/16/2012	12:39:51 AM	PH3 valve closed
2/16/2012	12:39:51 AM	SiCl4 pre valve closed
2/16/2012	12:39:51 AM	SiCl4 post valve closed
2/16/2012	12:39:51 AM	Bypass valve closed
2/16/2012	12:39:51 AM	Bubbler valve closed
2/16/2012	12:39:51 AM	Main Vac valve opened
2/16/2012	12:39:51 AM	Helium MFC set to  0.000000
2/16/2012	12:39:51 AM	H2 MFC set to  0.000000
2/16/2012	12:39:51 AM	BCl3 MFC set to  0.000000
2/16/2012	12:39:51 AM	PH3 MFC set to  0.000000
2/16/2012	12:39:51 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:39:51 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:39:51 AM	Tube furnace set to 150
2/16/2012	12:40:21 AM	H2 valve closed
2/16/2012	12:40:21 AM	BCl3 valve closed
2/16/2012	12:40:21 AM	PH3 valve closed
2/16/2012	12:40:21 AM	SiCl4 pre valve closed
2/16/2012	12:40:21 AM	SiCl4 post valve closed
2/16/2012	12:40:21 AM	Bypass valve closed
2/16/2012	12:40:21 AM	Bubbler valve closed
2/16/2012	12:40:21 AM	Helium valve opened
2/16/2012	12:40:21 AM	Main Vac valve opened
2/16/2012	12:40:21 AM	Helium MFC set to  20.000000
2/16/2012	12:40:21 AM	H2 MFC set to  0.000000
2/16/2012	12:40:21 AM	BCl3 MFC set to  0.000000
2/16/2012	12:40:21 AM	PH3 MFC set to  0.000000
2/16/2012	12:40:21 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:40:21 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:40:21 AM	Tube furnace set to 150
2/16/2012	12:40:51 AM	Helium valve closed
2/16/2012	12:40:51 AM	H2 valve closed
2/16/2012	12:40:51 AM	BCl3 valve closed
2/16/2012	12:40:51 AM	PH3 valve closed
2/16/2012	12:40:51 AM	SiCl4 pre valve closed
2/16/2012	12:40:51 AM	SiCl4 post valve closed
2/16/2012	12:40:51 AM	Bypass valve closed
2/16/2012	12:40:51 AM	Bubbler valve closed
2/16/2012	12:40:51 AM	Main Vac valve opened
2/16/2012	12:40:51 AM	Helium MFC set to  0.000000
2/16/2012	12:40:51 AM	H2 MFC set to  0.000000
2/16/2012	12:40:51 AM	BCl3 MFC set to  0.000000
2/16/2012	12:40:51 AM	PH3 MFC set to  0.000000
2/16/2012	12:40:51 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:40:51 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:40:51 AM	Tube furnace set to 150
2/16/2012	12:41:21 AM	H2 valve closed
2/16/2012	12:41:21 AM	BCl3 valve closed
2/16/2012	12:41:21 AM	PH3 valve closed
2/16/2012	12:41:21 AM	SiCl4 pre valve closed
2/16/2012	12:41:21 AM	SiCl4 post valve closed
2/16/2012	12:41:21 AM	Bypass valve closed
2/16/2012	12:41:21 AM	Bubbler valve closed
2/16/2012	12:41:21 AM	Helium valve opened
2/16/2012	12:41:21 AM	Main Vac valve opened
2/16/2012	12:41:21 AM	Helium MFC set to  20.000000
2/16/2012	12:41:21 AM	H2 MFC set to  0.000000
2/16/2012	12:41:21 AM	BCl3 MFC set to  0.000000
2/16/2012	12:41:21 AM	PH3 MFC set to  0.000000
2/16/2012	12:41:21 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:41:21 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:41:22 AM	Tube furnace set to 150
2/16/2012	12:41:52 AM	Helium valve closed
2/16/2012	12:41:52 AM	H2 valve closed
2/16/2012	12:41:52 AM	BCl3 valve closed
2/16/2012	12:41:52 AM	PH3 valve closed
2/16/2012	12:41:52 AM	SiCl4 pre valve closed
2/16/2012	12:41:52 AM	SiCl4 post valve closed
2/16/2012	12:41:52 AM	Bypass valve closed
2/16/2012	12:41:52 AM	Bubbler valve closed
2/16/2012	12:41:52 AM	Main Vac valve opened
2/16/2012	12:41:52 AM	Helium MFC set to  0.000000
2/16/2012	12:41:52 AM	H2 MFC set to  0.000000
2/16/2012	12:41:52 AM	BCl3 MFC set to  0.000000
2/16/2012	12:41:52 AM	PH3 MFC set to  0.000000
2/16/2012	12:41:52 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:41:52 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:41:52 AM	Tube furnace set to 150
2/16/2012	12:42:22 AM	H2 valve closed
2/16/2012	12:42:22 AM	BCl3 valve closed
2/16/2012	12:42:22 AM	PH3 valve closed
2/16/2012	12:42:22 AM	SiCl4 pre valve closed
2/16/2012	12:42:22 AM	SiCl4 post valve closed
2/16/2012	12:42:22 AM	Bypass valve closed
2/16/2012	12:42:22 AM	Bubbler valve closed
2/16/2012	12:42:22 AM	Helium valve opened
2/16/2012	12:42:22 AM	Main Vac valve opened
2/16/2012	12:42:22 AM	Helium MFC set to  20.000000
2/16/2012	12:42:22 AM	H2 MFC set to  0.000000
2/16/2012	12:42:22 AM	BCl3 MFC set to  0.000000
2/16/2012	12:42:22 AM	PH3 MFC set to  0.000000
2/16/2012	12:42:22 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:42:22 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:42:22 AM	Tube furnace set to 150
2/16/2012	12:42:52 AM	Helium valve closed
2/16/2012	12:42:52 AM	H2 valve closed
2/16/2012	12:42:52 AM	BCl3 valve closed
2/16/2012	12:42:52 AM	PH3 valve closed
2/16/2012	12:42:52 AM	SiCl4 pre valve closed
2/16/2012	12:42:52 AM	SiCl4 post valve closed
2/16/2012	12:42:52 AM	Bypass valve closed
2/16/2012	12:42:52 AM	Bubbler valve closed
2/16/2012	12:42:52 AM	Main Vac valve opened
2/16/2012	12:42:52 AM	Helium MFC set to  0.000000
2/16/2012	12:42:52 AM	H2 MFC set to  0.000000
2/16/2012	12:42:52 AM	BCl3 MFC set to  0.000000
2/16/2012	12:42:52 AM	PH3 MFC set to  0.000000
2/16/2012	12:42:52 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:42:52 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:42:52 AM	Tube furnace set to 150
2/16/2012	12:43:22 AM	H2 valve closed
2/16/2012	12:43:22 AM	BCl3 valve closed
2/16/2012	12:43:22 AM	PH3 valve closed
2/16/2012	12:43:22 AM	SiCl4 pre valve closed
2/16/2012	12:43:22 AM	SiCl4 post valve closed
2/16/2012	12:43:22 AM	Bypass valve closed
2/16/2012	12:43:22 AM	Bubbler valve closed
2/16/2012	12:43:22 AM	Helium valve opened
2/16/2012	12:43:22 AM	Main Vac valve opened
2/16/2012	12:43:22 AM	Helium MFC set to  20.000000
2/16/2012	12:43:22 AM	H2 MFC set to  0.000000
2/16/2012	12:43:22 AM	BCl3 MFC set to  0.000000
2/16/2012	12:43:22 AM	PH3 MFC set to  0.000000
2/16/2012	12:43:22 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:43:22 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:43:22 AM	Tube furnace set to 150
2/16/2012	12:43:52 AM	Helium valve closed
2/16/2012	12:43:52 AM	H2 valve closed
2/16/2012	12:43:52 AM	BCl3 valve closed
2/16/2012	12:43:52 AM	PH3 valve closed
2/16/2012	12:43:52 AM	SiCl4 pre valve closed
2/16/2012	12:43:52 AM	SiCl4 post valve closed
2/16/2012	12:43:52 AM	Bypass valve closed
2/16/2012	12:43:53 AM	Bubbler valve closed
2/16/2012	12:43:53 AM	Main Vac valve opened
2/16/2012	12:43:53 AM	Helium MFC set to  0.000000
2/16/2012	12:43:53 AM	H2 MFC set to  0.000000
2/16/2012	12:43:53 AM	BCl3 MFC set to  0.000000
2/16/2012	12:43:53 AM	PH3 MFC set to  0.000000
2/16/2012	12:43:53 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:43:53 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:43:53 AM	Tube furnace set to 150
2/16/2012	12:44:23 AM	H2 valve closed
2/16/2012	12:44:23 AM	BCl3 valve closed
2/16/2012	12:44:23 AM	PH3 valve closed
2/16/2012	12:44:23 AM	SiCl4 pre valve closed
2/16/2012	12:44:23 AM	SiCl4 post valve closed
2/16/2012	12:44:23 AM	Bypass valve closed
2/16/2012	12:44:23 AM	Bubbler valve closed
2/16/2012	12:44:23 AM	Helium valve opened
2/16/2012	12:44:23 AM	Main Vac valve opened
2/16/2012	12:44:23 AM	Helium MFC set to  20.000000
2/16/2012	12:44:23 AM	H2 MFC set to  0.000000
2/16/2012	12:44:23 AM	BCl3 MFC set to  0.000000
2/16/2012	12:44:23 AM	PH3 MFC set to  0.000000
2/16/2012	12:44:23 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:44:23 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:44:23 AM	Tube furnace set to 150
2/16/2012	12:44:53 AM	Helium valve closed
2/16/2012	12:44:53 AM	H2 valve closed
2/16/2012	12:44:53 AM	BCl3 valve closed
2/16/2012	12:44:53 AM	PH3 valve closed
2/16/2012	12:44:53 AM	SiCl4 pre valve closed
2/16/2012	12:44:53 AM	SiCl4 post valve closed
2/16/2012	12:44:53 AM	Bypass valve closed
2/16/2012	12:44:53 AM	Bubbler valve closed
2/16/2012	12:44:53 AM	Main Vac valve opened
2/16/2012	12:44:53 AM	Helium MFC set to  0.000000
2/16/2012	12:44:53 AM	H2 MFC set to  0.000000
2/16/2012	12:44:53 AM	BCl3 MFC set to  0.000000
2/16/2012	12:44:53 AM	PH3 MFC set to  0.000000
2/16/2012	12:44:53 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:44:53 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:44:53 AM	Tube furnace set to 150
2/16/2012	12:44:54 AM	Run finished at 12:44 AM
2/16/2012	12:48:43 AM	Main Vac valve closed
2/16/2012	12:48:53 AM	Main Vac valve opened
2/16/2012	12:49:00 AM	Recipe started at 12:48 AM
2/16/2012	12:49:00 AM	Helium valve closed
2/16/2012	12:49:00 AM	H2 valve closed
2/16/2012	12:49:00 AM	BCl3 valve closed
2/16/2012	12:49:00 AM	PH3 valve closed
2/16/2012	12:49:00 AM	SiCl4 pre valve closed
2/16/2012	12:49:00 AM	SiCl4 post valve closed
2/16/2012	12:49:00 AM	Bypass valve closed
2/16/2012	12:49:00 AM	Bubbler valve closed
2/16/2012	12:49:00 AM	Main Vac valve opened
2/16/2012	12:49:00 AM	Helium MFC set to  0.000000
2/16/2012	12:49:00 AM	H2 MFC set to  0.000000
2/16/2012	12:49:00 AM	BCl3 MFC set to  0.000000
2/16/2012	12:49:00 AM	PH3 MFC set to  0.000000
2/16/2012	12:49:00 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:49:00 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:49:01 AM	Tube furnace set to 150
2/16/2012	12:49:31 AM	H2 valve closed
2/16/2012	12:49:31 AM	BCl3 valve closed
2/16/2012	12:49:31 AM	PH3 valve closed
2/16/2012	12:49:31 AM	SiCl4 pre valve closed
2/16/2012	12:49:31 AM	SiCl4 post valve closed
2/16/2012	12:49:31 AM	Bypass valve closed
2/16/2012	12:49:31 AM	Bubbler valve closed
2/16/2012	12:49:31 AM	Helium valve opened
2/16/2012	12:49:31 AM	Main Vac valve opened
2/16/2012	12:49:31 AM	Helium MFC set to  20.000000
2/16/2012	12:49:31 AM	H2 MFC set to  0.000000
2/16/2012	12:49:31 AM	BCl3 MFC set to  0.000000
2/16/2012	12:49:31 AM	PH3 MFC set to  0.000000
2/16/2012	12:49:31 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:49:31 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:49:31 AM	Tube furnace set to 150
2/16/2012	12:50:01 AM	Helium valve closed
2/16/2012	12:50:01 AM	H2 valve closed
2/16/2012	12:50:01 AM	BCl3 valve closed
2/16/2012	12:50:01 AM	PH3 valve closed
2/16/2012	12:50:01 AM	SiCl4 pre valve closed
2/16/2012	12:50:01 AM	SiCl4 post valve closed
2/16/2012	12:50:01 AM	Bypass valve closed
2/16/2012	12:50:01 AM	Bubbler valve closed
2/16/2012	12:50:01 AM	Main Vac valve opened
2/16/2012	12:50:01 AM	Helium MFC set to  0.000000
2/16/2012	12:50:01 AM	H2 MFC set to  0.000000
2/16/2012	12:50:01 AM	BCl3 MFC set to  0.000000
2/16/2012	12:50:01 AM	PH3 MFC set to  0.000000
2/16/2012	12:50:01 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:50:01 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:50:01 AM	Tube furnace set to 150
2/16/2012	12:50:31 AM	H2 valve closed
2/16/2012	12:50:31 AM	BCl3 valve closed
2/16/2012	12:50:31 AM	PH3 valve closed
2/16/2012	12:50:31 AM	SiCl4 pre valve closed
2/16/2012	12:50:31 AM	SiCl4 post valve closed
2/16/2012	12:50:31 AM	Bypass valve closed
2/16/2012	12:50:31 AM	Bubbler valve closed
2/16/2012	12:50:31 AM	Helium valve opened
2/16/2012	12:50:31 AM	Main Vac valve opened
2/16/2012	12:50:31 AM	Helium MFC set to  20.000000
2/16/2012	12:50:31 AM	H2 MFC set to  0.000000
2/16/2012	12:50:31 AM	BCl3 MFC set to  0.000000
2/16/2012	12:50:31 AM	PH3 MFC set to  0.000000
2/16/2012	12:50:31 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:50:31 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:50:31 AM	Tube furnace set to 150
2/16/2012	12:51:01 AM	Helium valve closed
2/16/2012	12:51:01 AM	H2 valve closed
2/16/2012	12:51:01 AM	BCl3 valve closed
2/16/2012	12:51:01 AM	PH3 valve closed
2/16/2012	12:51:01 AM	SiCl4 pre valve closed
2/16/2012	12:51:01 AM	SiCl4 post valve closed
2/16/2012	12:51:01 AM	Bypass valve closed
2/16/2012	12:51:01 AM	Bubbler valve closed
2/16/2012	12:51:01 AM	Main Vac valve opened
2/16/2012	12:51:01 AM	Helium MFC set to  0.000000
2/16/2012	12:51:01 AM	H2 MFC set to  0.000000
2/16/2012	12:51:01 AM	BCl3 MFC set to  0.000000
2/16/2012	12:51:01 AM	PH3 MFC set to  0.000000
2/16/2012	12:51:01 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:51:01 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:51:01 AM	Tube furnace set to 150
2/16/2012	12:51:31 AM	H2 valve closed
2/16/2012	12:51:31 AM	BCl3 valve closed
2/16/2012	12:51:31 AM	PH3 valve closed
2/16/2012	12:51:31 AM	SiCl4 pre valve closed
2/16/2012	12:51:31 AM	SiCl4 post valve closed
2/16/2012	12:51:31 AM	Bypass valve closed
2/16/2012	12:51:31 AM	Bubbler valve closed
2/16/2012	12:51:31 AM	Helium valve opened
2/16/2012	12:51:31 AM	Main Vac valve opened
2/16/2012	12:51:31 AM	Helium MFC set to  20.000000
2/16/2012	12:51:31 AM	H2 MFC set to  0.000000
2/16/2012	12:51:31 AM	BCl3 MFC set to  0.000000
2/16/2012	12:51:31 AM	PH3 MFC set to  0.000000
2/16/2012	12:51:31 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:51:31 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:51:32 AM	Tube furnace set to 150
2/16/2012	12:52:02 AM	Helium valve closed
2/16/2012	12:52:02 AM	H2 valve closed
2/16/2012	12:52:02 AM	BCl3 valve closed
2/16/2012	12:52:02 AM	PH3 valve closed
2/16/2012	12:52:02 AM	SiCl4 pre valve closed
2/16/2012	12:52:02 AM	SiCl4 post valve closed
2/16/2012	12:52:02 AM	Bypass valve closed
2/16/2012	12:52:02 AM	Bubbler valve closed
2/16/2012	12:52:02 AM	Main Vac valve opened
2/16/2012	12:52:02 AM	Helium MFC set to  0.000000
2/16/2012	12:52:02 AM	H2 MFC set to  0.000000
2/16/2012	12:52:02 AM	BCl3 MFC set to  0.000000
2/16/2012	12:52:02 AM	PH3 MFC set to  0.000000
2/16/2012	12:52:02 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:52:02 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:52:02 AM	Tube furnace set to 150
2/16/2012	12:52:32 AM	H2 valve closed
2/16/2012	12:52:32 AM	BCl3 valve closed
2/16/2012	12:52:32 AM	PH3 valve closed
2/16/2012	12:52:32 AM	SiCl4 pre valve closed
2/16/2012	12:52:32 AM	SiCl4 post valve closed
2/16/2012	12:52:32 AM	Bypass valve closed
2/16/2012	12:52:32 AM	Bubbler valve closed
2/16/2012	12:52:32 AM	Helium valve opened
2/16/2012	12:52:32 AM	Main Vac valve opened
2/16/2012	12:52:32 AM	Helium MFC set to  20.000000
2/16/2012	12:52:32 AM	H2 MFC set to  0.000000
2/16/2012	12:52:32 AM	BCl3 MFC set to  0.000000
2/16/2012	12:52:32 AM	PH3 MFC set to  0.000000
2/16/2012	12:52:32 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:52:32 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:52:32 AM	Tube furnace set to 150
2/16/2012	12:53:02 AM	Helium valve closed
2/16/2012	12:53:02 AM	H2 valve closed
2/16/2012	12:53:02 AM	BCl3 valve closed
2/16/2012	12:53:02 AM	PH3 valve closed
2/16/2012	12:53:02 AM	SiCl4 pre valve closed
2/16/2012	12:53:02 AM	SiCl4 post valve closed
2/16/2012	12:53:02 AM	Bypass valve closed
2/16/2012	12:53:02 AM	Bubbler valve closed
2/16/2012	12:53:02 AM	Main Vac valve opened
2/16/2012	12:53:02 AM	Helium MFC set to  0.000000
2/16/2012	12:53:02 AM	H2 MFC set to  0.000000
2/16/2012	12:53:02 AM	BCl3 MFC set to  0.000000
2/16/2012	12:53:02 AM	PH3 MFC set to  0.000000
2/16/2012	12:53:02 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:53:02 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:53:02 AM	Tube furnace set to 150
2/16/2012	12:53:32 AM	H2 valve closed
2/16/2012	12:53:32 AM	BCl3 valve closed
2/16/2012	12:53:32 AM	PH3 valve closed
2/16/2012	12:53:32 AM	SiCl4 pre valve closed
2/16/2012	12:53:32 AM	SiCl4 post valve closed
2/16/2012	12:53:32 AM	Bypass valve closed
2/16/2012	12:53:32 AM	Bubbler valve closed
2/16/2012	12:53:32 AM	Helium valve opened
2/16/2012	12:53:32 AM	Main Vac valve opened
2/16/2012	12:53:32 AM	Helium MFC set to  20.000000
2/16/2012	12:53:32 AM	H2 MFC set to  0.000000
2/16/2012	12:53:32 AM	BCl3 MFC set to  0.000000
2/16/2012	12:53:32 AM	PH3 MFC set to  0.000000
2/16/2012	12:53:32 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:53:32 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:53:32 AM	Tube furnace set to 150
2/16/2012	12:54:02 AM	Helium valve closed
2/16/2012	12:54:02 AM	H2 valve closed
2/16/2012	12:54:02 AM	BCl3 valve closed
2/16/2012	12:54:02 AM	PH3 valve closed
2/16/2012	12:54:02 AM	SiCl4 pre valve closed
2/16/2012	12:54:02 AM	SiCl4 post valve closed
2/16/2012	12:54:02 AM	Bypass valve closed
2/16/2012	12:54:02 AM	Bubbler valve closed
2/16/2012	12:54:02 AM	Main Vac valve opened
2/16/2012	12:54:02 AM	Helium MFC set to  0.000000
2/16/2012	12:54:02 AM	H2 MFC set to  0.000000
2/16/2012	12:54:02 AM	BCl3 MFC set to  0.000000
2/16/2012	12:54:02 AM	PH3 MFC set to  0.000000
2/16/2012	12:54:02 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:54:02 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:54:03 AM	Tube furnace set to 150
2/16/2012	12:54:33 AM	H2 valve closed
2/16/2012	12:54:33 AM	BCl3 valve closed
2/16/2012	12:54:33 AM	PH3 valve closed
2/16/2012	12:54:33 AM	SiCl4 pre valve closed
2/16/2012	12:54:33 AM	SiCl4 post valve closed
2/16/2012	12:54:33 AM	Bypass valve closed
2/16/2012	12:54:33 AM	Bubbler valve closed
2/16/2012	12:54:33 AM	Helium valve opened
2/16/2012	12:54:33 AM	Main Vac valve opened
2/16/2012	12:54:33 AM	Helium MFC set to  20.000000
2/16/2012	12:54:33 AM	H2 MFC set to  0.000000
2/16/2012	12:54:33 AM	BCl3 MFC set to  0.000000
2/16/2012	12:54:33 AM	PH3 MFC set to  0.000000
2/16/2012	12:54:33 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:54:33 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:54:33 AM	Tube furnace set to 150
2/16/2012	12:55:03 AM	Helium valve closed
2/16/2012	12:55:03 AM	H2 valve closed
2/16/2012	12:55:03 AM	BCl3 valve closed
2/16/2012	12:55:03 AM	PH3 valve closed
2/16/2012	12:55:03 AM	SiCl4 pre valve closed
2/16/2012	12:55:03 AM	SiCl4 post valve closed
2/16/2012	12:55:03 AM	Bypass valve closed
2/16/2012	12:55:03 AM	Bubbler valve closed
2/16/2012	12:55:03 AM	Main Vac valve opened
2/16/2012	12:55:03 AM	Helium MFC set to  0.000000
2/16/2012	12:55:03 AM	H2 MFC set to  0.000000
2/16/2012	12:55:03 AM	BCl3 MFC set to  0.000000
2/16/2012	12:55:03 AM	PH3 MFC set to  0.000000
2/16/2012	12:55:03 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:55:03 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:55:03 AM	Tube furnace set to 150
2/16/2012	12:55:33 AM	H2 valve closed
2/16/2012	12:55:33 AM	BCl3 valve closed
2/16/2012	12:55:33 AM	PH3 valve closed
2/16/2012	12:55:33 AM	SiCl4 pre valve closed
2/16/2012	12:55:33 AM	SiCl4 post valve closed
2/16/2012	12:55:33 AM	Bypass valve closed
2/16/2012	12:55:33 AM	Bubbler valve closed
2/16/2012	12:55:33 AM	Helium valve opened
2/16/2012	12:55:33 AM	Main Vac valve opened
2/16/2012	12:55:33 AM	Helium MFC set to  20.000000
2/16/2012	12:55:33 AM	H2 MFC set to  0.000000
2/16/2012	12:55:33 AM	BCl3 MFC set to  0.000000
2/16/2012	12:55:33 AM	PH3 MFC set to  0.000000
2/16/2012	12:55:33 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:55:33 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:55:33 AM	Tube furnace set to 150
2/16/2012	12:56:03 AM	Helium valve closed
2/16/2012	12:56:03 AM	H2 valve closed
2/16/2012	12:56:03 AM	BCl3 valve closed
2/16/2012	12:56:03 AM	PH3 valve closed
2/16/2012	12:56:03 AM	SiCl4 pre valve closed
2/16/2012	12:56:03 AM	SiCl4 post valve closed
2/16/2012	12:56:03 AM	Bypass valve closed
2/16/2012	12:56:03 AM	Bubbler valve closed
2/16/2012	12:56:03 AM	Main Vac valve opened
2/16/2012	12:56:03 AM	Helium MFC set to  0.000000
2/16/2012	12:56:03 AM	H2 MFC set to  0.000000
2/16/2012	12:56:03 AM	BCl3 MFC set to  0.000000
2/16/2012	12:56:03 AM	PH3 MFC set to  0.000000
2/16/2012	12:56:03 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:56:03 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:56:03 AM	Tube furnace set to 150
2/16/2012	12:56:33 AM	H2 valve closed
2/16/2012	12:56:33 AM	BCl3 valve closed
2/16/2012	12:56:33 AM	PH3 valve closed
2/16/2012	12:56:33 AM	SiCl4 pre valve closed
2/16/2012	12:56:33 AM	SiCl4 post valve closed
2/16/2012	12:56:33 AM	Bypass valve closed
2/16/2012	12:56:33 AM	Bubbler valve closed
2/16/2012	12:56:33 AM	Helium valve opened
2/16/2012	12:56:33 AM	Main Vac valve opened
2/16/2012	12:56:33 AM	Helium MFC set to  20.000000
2/16/2012	12:56:33 AM	H2 MFC set to  0.000000
2/16/2012	12:56:33 AM	BCl3 MFC set to  0.000000
2/16/2012	12:56:33 AM	PH3 MFC set to  0.000000
2/16/2012	12:56:33 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:56:33 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:56:34 AM	Tube furnace set to 150
2/16/2012	12:57:04 AM	Helium valve closed
2/16/2012	12:57:04 AM	H2 valve closed
2/16/2012	12:57:04 AM	BCl3 valve closed
2/16/2012	12:57:04 AM	PH3 valve closed
2/16/2012	12:57:04 AM	SiCl4 pre valve closed
2/16/2012	12:57:04 AM	SiCl4 post valve closed
2/16/2012	12:57:04 AM	Bypass valve closed
2/16/2012	12:57:04 AM	Bubbler valve closed
2/16/2012	12:57:04 AM	Main Vac valve opened
2/16/2012	12:57:04 AM	Helium MFC set to  0.000000
2/16/2012	12:57:04 AM	H2 MFC set to  0.000000
2/16/2012	12:57:04 AM	BCl3 MFC set to  0.000000
2/16/2012	12:57:04 AM	PH3 MFC set to  0.000000
2/16/2012	12:57:04 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:57:04 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:57:04 AM	Tube furnace set to 150
2/16/2012	12:57:34 AM	H2 valve closed
2/16/2012	12:57:34 AM	BCl3 valve closed
2/16/2012	12:57:34 AM	PH3 valve closed
2/16/2012	12:57:34 AM	SiCl4 pre valve closed
2/16/2012	12:57:34 AM	SiCl4 post valve closed
2/16/2012	12:57:34 AM	Bypass valve closed
2/16/2012	12:57:34 AM	Bubbler valve closed
2/16/2012	12:57:34 AM	Helium valve opened
2/16/2012	12:57:34 AM	Main Vac valve opened
2/16/2012	12:57:34 AM	Helium MFC set to  20.000000
2/16/2012	12:57:34 AM	H2 MFC set to  0.000000
2/16/2012	12:57:34 AM	BCl3 MFC set to  0.000000
2/16/2012	12:57:34 AM	PH3 MFC set to  0.000000
2/16/2012	12:57:34 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:57:34 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:57:34 AM	Tube furnace set to 150
2/16/2012	12:58:04 AM	Helium valve closed
2/16/2012	12:58:04 AM	H2 valve closed
2/16/2012	12:58:04 AM	BCl3 valve closed
2/16/2012	12:58:04 AM	PH3 valve closed
2/16/2012	12:58:04 AM	SiCl4 pre valve closed
2/16/2012	12:58:04 AM	SiCl4 post valve closed
2/16/2012	12:58:04 AM	Bypass valve closed
2/16/2012	12:58:04 AM	Bubbler valve closed
2/16/2012	12:58:04 AM	Main Vac valve opened
2/16/2012	12:58:04 AM	Helium MFC set to  0.000000
2/16/2012	12:58:04 AM	H2 MFC set to  0.000000
2/16/2012	12:58:04 AM	BCl3 MFC set to  0.000000
2/16/2012	12:58:04 AM	PH3 MFC set to  0.000000
2/16/2012	12:58:04 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:58:04 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:58:04 AM	Tube furnace set to 150
2/16/2012	12:58:34 AM	H2 valve closed
2/16/2012	12:58:34 AM	BCl3 valve closed
2/16/2012	12:58:34 AM	PH3 valve closed
2/16/2012	12:58:34 AM	SiCl4 pre valve closed
2/16/2012	12:58:34 AM	SiCl4 post valve closed
2/16/2012	12:58:34 AM	Bypass valve closed
2/16/2012	12:58:34 AM	Bubbler valve closed
2/16/2012	12:58:34 AM	Helium valve opened
2/16/2012	12:58:34 AM	Main Vac valve opened
2/16/2012	12:58:34 AM	Helium MFC set to  20.000000
2/16/2012	12:58:34 AM	H2 MFC set to  0.000000
2/16/2012	12:58:34 AM	BCl3 MFC set to  0.000000
2/16/2012	12:58:34 AM	PH3 MFC set to  0.000000
2/16/2012	12:58:34 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:58:34 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:58:34 AM	Tube furnace set to 150
2/16/2012	12:59:04 AM	Helium valve closed
2/16/2012	12:59:04 AM	H2 valve closed
2/16/2012	12:59:04 AM	BCl3 valve closed
2/16/2012	12:59:04 AM	PH3 valve closed
2/16/2012	12:59:04 AM	SiCl4 pre valve closed
2/16/2012	12:59:04 AM	SiCl4 post valve closed
2/16/2012	12:59:04 AM	Bypass valve closed
2/16/2012	12:59:04 AM	Bubbler valve closed
2/16/2012	12:59:04 AM	Main Vac valve opened
2/16/2012	12:59:04 AM	Helium MFC set to  0.000000
2/16/2012	12:59:04 AM	H2 MFC set to  0.000000
2/16/2012	12:59:04 AM	BCl3 MFC set to  0.000000
2/16/2012	12:59:04 AM	PH3 MFC set to  0.000000
2/16/2012	12:59:04 AM	SiCl4 MFC set to  0.000000
2/16/2012	12:59:04 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	12:59:05 AM	Tube furnace set to 150
2/16/2012	12:59:06 AM	Run finished at 12:59 AM
2/16/2012	1:01:07 AM	Main Vac valve closed
2/16/2012	1:01:28 AM	Main Vac valve opened
2/16/2012	1:02:51 AM	Recipe started at 1:02 AM
2/16/2012	1:02:51 AM	Helium valve closed
2/16/2012	1:02:51 AM	H2 valve closed
2/16/2012	1:02:51 AM	BCl3 valve closed
2/16/2012	1:02:51 AM	PH3 valve closed
2/16/2012	1:02:51 AM	SiCl4 pre valve closed
2/16/2012	1:02:51 AM	SiCl4 post valve closed
2/16/2012	1:02:51 AM	Main Vac valve closed
2/16/2012	1:02:51 AM	Bypass valve closed
2/16/2012	1:02:51 AM	Bubbler valve closed
2/16/2012	1:02:51 AM	Helium MFC set to  0.000000
2/16/2012	1:02:51 AM	H2 MFC set to  0.000000
2/16/2012	1:02:51 AM	BCl3 MFC set to  0.000000
2/16/2012	1:02:51 AM	PH3 MFC set to  0.000000
2/16/2012	1:02:51 AM	SiCl4 MFC set to  0.000000
2/16/2012	1:02:51 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:02:52 AM	Tube furnace set to 0
2/16/2012	1:02:55 AM	Helium valve closed
2/16/2012	1:02:55 AM	BCl3 valve closed
2/16/2012	1:02:55 AM	PH3 valve closed
2/16/2012	1:02:55 AM	SiCl4 pre valve closed
2/16/2012	1:02:55 AM	SiCl4 post valve closed
2/16/2012	1:02:55 AM	Main Vac valve closed
2/16/2012	1:02:55 AM	Bypass valve closed
2/16/2012	1:02:55 AM	Bubbler valve closed
2/16/2012	1:02:55 AM	H2 valve opened
2/16/2012	1:02:55 AM	Helium MFC set to  0.000000
2/16/2012	1:02:55 AM	H2 MFC set to  500.000000
2/16/2012	1:02:55 AM	BCl3 MFC set to  0.000000
2/16/2012	1:02:55 AM	PH3 MFC set to  0.000000
2/16/2012	1:02:55 AM	SiCl4 MFC set to  0.000000
2/16/2012	1:02:55 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:02:55 AM	Tube furnace set to 0
2/16/2012	1:03:57 AM	Helium valve closed
2/16/2012	1:03:57 AM	BCl3 valve closed
2/16/2012	1:03:57 AM	PH3 valve closed
2/16/2012	1:03:57 AM	SiCl4 pre valve closed
2/16/2012	1:03:57 AM	SiCl4 post valve closed
2/16/2012	1:03:57 AM	Main Vac valve closed
2/16/2012	1:03:57 AM	Bypass valve closed
2/16/2012	1:03:57 AM	H2 valve opened
2/16/2012	1:03:57 AM	Bubbler valve opened
2/16/2012	1:03:57 AM	Helium MFC set to  0.000000
2/16/2012	1:03:57 AM	H2 MFC set to  500.000000
2/16/2012	1:03:57 AM	BCl3 MFC set to  0.000000
2/16/2012	1:03:57 AM	PH3 MFC set to  0.000000
2/16/2012	1:03:57 AM	SiCl4 MFC set to  0.000000
2/16/2012	1:03:57 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:03:57 AM	Tube furnace set to 0
2/16/2012	1:03:58 AM	Helium valve closed
2/16/2012	1:03:58 AM	BCl3 valve closed
2/16/2012	1:03:58 AM	PH3 valve closed
2/16/2012	1:03:58 AM	SiCl4 pre valve closed
2/16/2012	1:03:58 AM	SiCl4 post valve closed
2/16/2012	1:03:58 AM	Main Vac valve closed
2/16/2012	1:03:58 AM	Bypass valve closed
2/16/2012	1:03:58 AM	H2 valve opened
2/16/2012	1:03:58 AM	Bubbler valve opened
2/16/2012	1:03:58 AM	Helium MFC set to  0.000000
2/16/2012	1:03:58 AM	H2 MFC set to  450.000000
2/16/2012	1:03:58 AM	BCl3 MFC set to  0.000000
2/16/2012	1:03:58 AM	PH3 MFC set to  0.000000
2/16/2012	1:03:58 AM	SiCl4 MFC set to  0.000000
2/16/2012	1:03:58 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:03:58 AM	Tube furnace set to 1000
2/16/2012	1:28:59 AM	Helium valve closed
2/16/2012	1:28:59 AM	PH3 valve closed
2/16/2012	1:28:59 AM	Main Vac valve closed
2/16/2012	1:28:59 AM	Bypass valve closed
2/16/2012	1:28:59 AM	H2 valve opened
2/16/2012	1:28:59 AM	BCl3 valve opened
2/16/2012	1:28:59 AM	SiCl4 pre valve opened
2/16/2012	1:28:59 AM	SiCl4 post valve opened
2/16/2012	1:28:59 AM	Bubbler valve opened
2/16/2012	1:28:59 AM	Helium MFC set to  0.000000
2/16/2012	1:28:59 AM	H2 MFC set to  450.000000
2/16/2012	1:28:59 AM	BCl3 MFC set to  20.000000
2/16/2012	1:28:59 AM	PH3 MFC set to  0.000000
2/16/2012	1:28:59 AM	SiCl4 MFC set to  50.000000
2/16/2012	1:28:59 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:28:59 AM	Tube furnace set to 1000
2/16/2012	1:36:59 AM	Helium valve closed
2/16/2012	1:36:59 AM	BCl3 valve closed
2/16/2012	1:36:59 AM	PH3 valve closed
2/16/2012	1:36:59 AM	SiCl4 pre valve closed
2/16/2012	1:36:59 AM	SiCl4 post valve closed
2/16/2012	1:36:59 AM	Main Vac valve closed
2/16/2012	1:36:59 AM	Bypass valve closed
2/16/2012	1:36:59 AM	H2 valve opened
2/16/2012	1:36:59 AM	Bubbler valve opened
2/16/2012	1:36:59 AM	Helium MFC set to  0.000000
2/16/2012	1:36:59 AM	H2 MFC set to  500.000000
2/16/2012	1:36:59 AM	BCl3 MFC set to  0.000000
2/16/2012	1:36:59 AM	PH3 MFC set to  0.000000
2/16/2012	1:36:59 AM	SiCl4 MFC set to  0.000000
2/16/2012	1:36:59 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:36:59 AM	Tube furnace set to 750
2/16/2012	1:41:59 AM	H2 valve closed
2/16/2012	1:41:59 AM	BCl3 valve closed
2/16/2012	1:41:59 AM	PH3 valve closed
2/16/2012	1:41:59 AM	SiCl4 pre valve closed
2/16/2012	1:41:59 AM	SiCl4 post valve closed
2/16/2012	1:41:59 AM	Main Vac valve closed
2/16/2012	1:41:59 AM	Bypass valve closed
2/16/2012	1:41:59 AM	Helium valve opened
2/16/2012	1:41:59 AM	Bubbler valve opened
2/16/2012	1:41:59 AM	Helium MFC set to  500.000000
2/16/2012	1:41:59 AM	H2 MFC set to  0.000000
2/16/2012	1:41:59 AM	BCl3 MFC set to  0.000000
2/16/2012	1:41:59 AM	PH3 MFC set to  0.000000
2/16/2012	1:41:59 AM	SiCl4 MFC set to  0.000000
2/16/2012	1:41:59 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:41:59 AM	Tube furnace set to 0
2/16/2012	2:00:29 AM	Helium valve closed
2/16/2012	2:00:29 AM	H2 valve closed
2/16/2012	2:00:29 AM	BCl3 valve closed
2/16/2012	2:00:29 AM	PH3 valve closed
2/16/2012	2:00:29 AM	SiCl4 pre valve closed
2/16/2012	2:00:29 AM	SiCl4 post valve closed
2/16/2012	2:00:29 AM	Main Vac valve closed
2/16/2012	2:00:29 AM	Bypass valve closed
2/16/2012	2:00:29 AM	Bubbler valve closed
2/16/2012	2:00:29 AM	Helium MFC set to  0.000000
2/16/2012	2:00:29 AM	H2 MFC set to  0.000000
2/16/2012	2:00:29 AM	BCl3 MFC set to  0.000000
2/16/2012	2:00:29 AM	PH3 MFC set to  0.000000
2/16/2012	2:00:29 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:00:29 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:00:29 AM	Tube furnace set to 0
2/16/2012	2:00:30 AM	Run finished at 2:00 AM
2/16/2012	2:00:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	2:00:35 AM	Recipe started at 2:00 AM
2/16/2012	2:00:36 AM	Helium valve closed
2/16/2012	2:00:36 AM	H2 valve closed
2/16/2012	2:00:36 AM	BCl3 valve closed
2/16/2012	2:00:36 AM	PH3 valve closed
2/16/2012	2:00:36 AM	SiCl4 pre valve closed
2/16/2012	2:00:36 AM	SiCl4 post valve closed
2/16/2012	2:00:36 AM	Main Vac valve closed
2/16/2012	2:00:36 AM	Bypass valve closed
2/16/2012	2:00:36 AM	Bubbler valve closed
2/16/2012	2:00:36 AM	Helium MFC set to  0.000000
2/16/2012	2:00:36 AM	H2 MFC set to  0.000000
2/16/2012	2:00:36 AM	BCl3 MFC set to  0.000000
2/16/2012	2:00:36 AM	PH3 MFC set to  0.000000
2/16/2012	2:00:36 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:00:36 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:00:36 AM	Tube furnace set to 0
2/16/2012	2:00:39 AM	H2 valve closed
2/16/2012	2:00:39 AM	BCl3 valve closed
2/16/2012	2:00:39 AM	PH3 valve closed
2/16/2012	2:00:39 AM	SiCl4 pre valve closed
2/16/2012	2:00:39 AM	SiCl4 post valve closed
2/16/2012	2:00:39 AM	Main Vac valve closed
2/16/2012	2:00:39 AM	Bypass valve closed
2/16/2012	2:00:39 AM	Bubbler valve closed
2/16/2012	2:00:39 AM	Helium valve opened
2/16/2012	2:00:39 AM	Helium MFC set to  500.000000
2/16/2012	2:00:39 AM	H2 MFC set to  0.000000
2/16/2012	2:00:39 AM	BCl3 MFC set to  0.000000
2/16/2012	2:00:39 AM	PH3 MFC set to  0.000000
2/16/2012	2:00:39 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:00:39 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:00:39 AM	Tube furnace set to 0
2/16/2012	2:00:39 AM	Helium valve closed
2/16/2012	2:00:39 AM	H2 valve closed
2/16/2012	2:00:39 AM	BCl3 valve closed
2/16/2012	2:00:39 AM	PH3 valve closed
2/16/2012	2:00:39 AM	SiCl4 pre valve closed
2/16/2012	2:00:39 AM	SiCl4 post valve closed
2/16/2012	2:00:39 AM	Main Vac valve closed
2/16/2012	2:00:39 AM	Bypass valve closed
2/16/2012	2:00:39 AM	Bubbler valve closed
2/16/2012	2:00:39 AM	Helium MFC set to  0.000000
2/16/2012	2:00:39 AM	H2 MFC set to  0.000000
2/16/2012	2:00:39 AM	BCl3 MFC set to  0.000000
2/16/2012	2:00:39 AM	PH3 MFC set to  0.000000
2/16/2012	2:00:39 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:00:39 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:00:39 AM	Tube furnace set to 0
2/16/2012	2:00:40 AM	Run finished at 2:00 AM
2/16/2012	2:00:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	2:11:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	2:11:17 AM	Recipe started at 2:11 AM
2/16/2012	2:11:17 AM	Helium valve closed
2/16/2012	2:11:17 AM	H2 valve closed
2/16/2012	2:11:17 AM	BCl3 valve closed
2/16/2012	2:11:17 AM	PH3 valve closed
2/16/2012	2:11:17 AM	SiCl4 pre valve closed
2/16/2012	2:11:17 AM	SiCl4 post valve closed
2/16/2012	2:11:17 AM	Main Vac valve closed
2/16/2012	2:11:17 AM	Bubbler valve closed
2/16/2012	2:11:17 AM	Bypass valve opened
2/16/2012	2:11:17 AM	Helium MFC set to  0.000000
2/16/2012	2:11:17 AM	H2 MFC set to  0.000000
2/16/2012	2:11:17 AM	BCl3 MFC set to  0.000000
2/16/2012	2:11:17 AM	PH3 MFC set to  0.000000
2/16/2012	2:11:17 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:11:17 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:11:18 AM	Tube furnace set to 0
2/16/2012	2:12:24 AM	Helium valve closed
2/16/2012	2:12:24 AM	H2 valve closed
2/16/2012	2:12:24 AM	BCl3 valve closed
2/16/2012	2:12:24 AM	PH3 valve closed
2/16/2012	2:12:24 AM	SiCl4 pre valve closed
2/16/2012	2:12:24 AM	SiCl4 post valve closed
2/16/2012	2:12:24 AM	Main Vac valve closed
2/16/2012	2:12:24 AM	Bubbler valve closed
2/16/2012	2:12:24 AM	Bypass valve opened
2/16/2012	2:12:24 AM	Helium MFC set to  0.000000
2/16/2012	2:12:24 AM	H2 MFC set to  0.000000
2/16/2012	2:12:24 AM	BCl3 MFC set to  0.000000
2/16/2012	2:12:24 AM	PH3 MFC set to  0.000000
2/16/2012	2:12:24 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:12:24 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:12:24 AM	Tube furnace set to 0
2/16/2012	2:13:22 AM	Run aborted at 2:13 AM
2/16/2012	2:13:22 AM	Helium valve closed
2/16/2012	2:13:22 AM	H2 valve closed
2/16/2012	2:13:22 AM	BCl3 valve closed
2/16/2012	2:13:22 AM	PH3 valve closed
2/16/2012	2:13:22 AM	SiCl4 pre valve closed
2/16/2012	2:13:22 AM	SiCl4 post valve closed
2/16/2012	2:13:22 AM	Bypass valve closed
2/16/2012	2:13:22 AM	Main Vac valve closed
2/16/2012	2:13:22 AM	Bubbler valve closed
2/16/2012	2:13:22 AM	Helium MFC set to  0.000000
2/16/2012	2:13:22 AM	H2 MFC set to  0.000000
2/16/2012	2:13:22 AM	BCl3 MFC set to  0.000000
2/16/2012	2:13:22 AM	PH3 MFC set to  0.000000
2/16/2012	2:13:22 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:13:23 AM	Tube furnace set to 0
2/16/2012	2:13:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	2:13:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	2:13:26 AM	Recipe started at 2:13 AM
2/16/2012	2:13:26 AM	Helium valve closed
2/16/2012	2:13:26 AM	H2 valve closed
2/16/2012	2:13:26 AM	BCl3 valve closed
2/16/2012	2:13:26 AM	PH3 valve closed
2/16/2012	2:13:26 AM	SiCl4 pre valve closed
2/16/2012	2:13:26 AM	SiCl4 post valve closed
2/16/2012	2:13:26 AM	Main Vac valve closed
2/16/2012	2:13:26 AM	Bypass valve closed
2/16/2012	2:13:26 AM	Bubbler valve closed
2/16/2012	2:13:26 AM	Helium MFC set to  0.000000
2/16/2012	2:13:26 AM	H2 MFC set to  0.000000
2/16/2012	2:13:26 AM	BCl3 MFC set to  0.000000
2/16/2012	2:13:26 AM	PH3 MFC set to  0.000000
2/16/2012	2:13:26 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:13:26 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:13:26 AM	Tube furnace set to 0
2/16/2012	2:13:29 AM	H2 valve closed
2/16/2012	2:13:29 AM	BCl3 valve closed
2/16/2012	2:13:29 AM	PH3 valve closed
2/16/2012	2:13:29 AM	SiCl4 pre valve closed
2/16/2012	2:13:29 AM	SiCl4 post valve closed
2/16/2012	2:13:29 AM	Main Vac valve closed
2/16/2012	2:13:29 AM	Bypass valve closed
2/16/2012	2:13:29 AM	Bubbler valve closed
2/16/2012	2:13:29 AM	Helium valve opened
2/16/2012	2:13:29 AM	Helium MFC set to  500.000000
2/16/2012	2:13:29 AM	H2 MFC set to  0.000000
2/16/2012	2:13:29 AM	BCl3 MFC set to  0.000000
2/16/2012	2:13:29 AM	PH3 MFC set to  0.000000
2/16/2012	2:13:29 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:13:29 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:13:30 AM	Tube furnace set to 0
2/16/2012	2:14:29 AM	Helium valve closed
2/16/2012	2:14:29 AM	H2 valve closed
2/16/2012	2:14:29 AM	BCl3 valve closed
2/16/2012	2:14:29 AM	PH3 valve closed
2/16/2012	2:14:29 AM	SiCl4 pre valve closed
2/16/2012	2:14:29 AM	SiCl4 post valve closed
2/16/2012	2:14:29 AM	Main Vac valve closed
2/16/2012	2:14:29 AM	Bypass valve closed
2/16/2012	2:14:29 AM	Bubbler valve closed
2/16/2012	2:14:29 AM	Helium MFC set to  0.000000
2/16/2012	2:14:29 AM	H2 MFC set to  0.000000
2/16/2012	2:14:29 AM	BCl3 MFC set to  0.000000
2/16/2012	2:14:29 AM	PH3 MFC set to  0.000000
2/16/2012	2:14:29 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:14:29 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:14:29 AM	Tube furnace set to 0
2/16/2012	2:14:30 AM	Run finished at 2:14 AM
2/16/2012	2:14:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	2:17:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	2:17:10 AM	Recipe started at 2:17 AM
2/16/2012	2:17:10 AM	Helium valve closed
2/16/2012	2:17:10 AM	H2 valve closed
2/16/2012	2:17:10 AM	BCl3 valve closed
2/16/2012	2:17:10 AM	PH3 valve closed
2/16/2012	2:17:10 AM	SiCl4 pre valve closed
2/16/2012	2:17:10 AM	SiCl4 post valve closed
2/16/2012	2:17:10 AM	Main Vac valve closed
2/16/2012	2:17:10 AM	Bubbler valve closed
2/16/2012	2:17:10 AM	Bypass valve opened
2/16/2012	2:17:10 AM	Helium MFC set to  0.000000
2/16/2012	2:17:10 AM	H2 MFC set to  0.000000
2/16/2012	2:17:10 AM	BCl3 MFC set to  0.000000
2/16/2012	2:17:10 AM	PH3 MFC set to  0.000000
2/16/2012	2:17:10 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:17:10 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:17:11 AM	Tube furnace set to 0
2/16/2012	2:18:11 AM	Helium valve closed
2/16/2012	2:18:11 AM	H2 valve closed
2/16/2012	2:18:11 AM	BCl3 valve closed
2/16/2012	2:18:11 AM	PH3 valve closed
2/16/2012	2:18:11 AM	SiCl4 pre valve closed
2/16/2012	2:18:11 AM	SiCl4 post valve closed
2/16/2012	2:18:11 AM	Main Vac valve closed
2/16/2012	2:18:11 AM	Bubbler valve closed
2/16/2012	2:18:11 AM	Bypass valve opened
2/16/2012	2:18:11 AM	Helium MFC set to  0.000000
2/16/2012	2:18:11 AM	H2 MFC set to  0.000000
2/16/2012	2:18:11 AM	BCl3 MFC set to  0.000000
2/16/2012	2:18:11 AM	PH3 MFC set to  0.000000
2/16/2012	2:18:11 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:18:11 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:18:11 AM	Tube furnace set to 0
2/16/2012	2:19:11 AM	Helium valve closed
2/16/2012	2:19:11 AM	H2 valve closed
2/16/2012	2:19:11 AM	BCl3 valve closed
2/16/2012	2:19:11 AM	PH3 valve closed
2/16/2012	2:19:11 AM	SiCl4 pre valve closed
2/16/2012	2:19:11 AM	SiCl4 post valve closed
2/16/2012	2:19:11 AM	Bypass valve closed
2/16/2012	2:19:11 AM	Bubbler valve closed
2/16/2012	2:19:11 AM	Main Vac valve opened
2/16/2012	2:19:11 AM	Helium MFC set to  0.000000
2/16/2012	2:19:11 AM	H2 MFC set to  0.000000
2/16/2012	2:19:11 AM	BCl3 MFC set to  0.000000
2/16/2012	2:19:11 AM	PH3 MFC set to  0.000000
2/16/2012	2:19:11 AM	SiCl4 MFC set to  0.000000
2/16/2012	2:19:11 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:19:11 AM	Tube furnace set to 0
2/16/2012	2:19:12 AM	Run finished at 2:19 AM
2/16/2012	2:19:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	8:14:59 AM	Main Vac valve closed
2/16/2012	8:15:09 AM	Main Vac valve opened
2/16/2012	8:22:09 AM	Main Vac valve closed
2/16/2012	8:22:19 AM	Main Vac valve opened
2/16/2012	8:37:44 AM	Main Vac valve closed
2/16/2012	8:37:58 AM	Main Vac valve opened
2/16/2012	9:38:13 AM	Main Vac valve closed
2/16/2012	9:38:50 AM	Main Vac valve opened
2/16/2012	9:39:21 AM	Recipe started at 9:39 AM
2/16/2012	9:39:22 AM	Helium valve closed
2/16/2012	9:39:22 AM	H2 valve closed
2/16/2012	9:39:22 AM	BCl3 valve closed
2/16/2012	9:39:22 AM	PH3 valve closed
2/16/2012	9:39:22 AM	SiCl4 pre valve closed
2/16/2012	9:39:22 AM	SiCl4 post valve closed
2/16/2012	9:39:22 AM	Main Vac valve closed
2/16/2012	9:39:22 AM	Bypass valve closed
2/16/2012	9:39:22 AM	Bubbler valve closed
2/16/2012	9:39:22 AM	Helium MFC set to  0.000000
2/16/2012	9:39:22 AM	H2 MFC set to  0.000000
2/16/2012	9:39:22 AM	BCl3 MFC set to  0.000000
2/16/2012	9:39:22 AM	PH3 MFC set to  0.000000
2/16/2012	9:39:22 AM	SiCl4 MFC set to  0.000000
2/16/2012	9:39:22 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:39:22 AM	Tube furnace set to 0
2/16/2012	9:39:25 AM	Helium valve closed
2/16/2012	9:39:25 AM	BCl3 valve closed
2/16/2012	9:39:25 AM	PH3 valve closed
2/16/2012	9:39:25 AM	SiCl4 pre valve closed
2/16/2012	9:39:25 AM	SiCl4 post valve closed
2/16/2012	9:39:25 AM	Main Vac valve closed
2/16/2012	9:39:25 AM	Bypass valve closed
2/16/2012	9:39:25 AM	Bubbler valve closed
2/16/2012	9:39:25 AM	H2 valve opened
2/16/2012	9:39:25 AM	Helium MFC set to  0.000000
2/16/2012	9:39:25 AM	H2 MFC set to  500.000000
2/16/2012	9:39:25 AM	BCl3 MFC set to  0.000000
2/16/2012	9:39:25 AM	PH3 MFC set to  0.000000
2/16/2012	9:39:25 AM	SiCl4 MFC set to  0.000000
2/16/2012	9:39:25 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:39:25 AM	Tube furnace set to 0
2/16/2012	9:40:33 AM	Helium valve closed
2/16/2012	9:40:33 AM	BCl3 valve closed
2/16/2012	9:40:33 AM	PH3 valve closed
2/16/2012	9:40:33 AM	SiCl4 pre valve closed
2/16/2012	9:40:33 AM	SiCl4 post valve closed
2/16/2012	9:40:33 AM	Main Vac valve closed
2/16/2012	9:40:33 AM	Bypass valve closed
2/16/2012	9:40:33 AM	H2 valve opened
2/16/2012	9:40:33 AM	Bubbler valve opened
2/16/2012	9:40:33 AM	Helium MFC set to  0.000000
2/16/2012	9:40:33 AM	H2 MFC set to  500.000000
2/16/2012	9:40:33 AM	BCl3 MFC set to  0.000000
2/16/2012	9:40:33 AM	PH3 MFC set to  0.000000
2/16/2012	9:40:33 AM	SiCl4 MFC set to  0.000000
2/16/2012	9:40:33 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:40:33 AM	Tube furnace set to 0
2/16/2012	9:40:34 AM	Helium valve closed
2/16/2012	9:40:34 AM	BCl3 valve closed
2/16/2012	9:40:34 AM	PH3 valve closed
2/16/2012	9:40:34 AM	SiCl4 pre valve closed
2/16/2012	9:40:34 AM	SiCl4 post valve closed
2/16/2012	9:40:34 AM	Main Vac valve closed
2/16/2012	9:40:34 AM	Bypass valve closed
2/16/2012	9:40:34 AM	H2 valve opened
2/16/2012	9:40:34 AM	Bubbler valve opened
2/16/2012	9:40:34 AM	Helium MFC set to  0.000000
2/16/2012	9:40:34 AM	H2 MFC set to  500.000000
2/16/2012	9:40:34 AM	BCl3 MFC set to  0.000000
2/16/2012	9:40:34 AM	PH3 MFC set to  0.000000
2/16/2012	9:40:34 AM	SiCl4 MFC set to  0.000000
2/16/2012	9:40:34 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:40:34 AM	Tube furnace set to 1000
2/16/2012	10:05:34 AM	Helium valve closed
2/16/2012	10:05:34 AM	PH3 valve closed
2/16/2012	10:05:34 AM	Main Vac valve closed
2/16/2012	10:05:34 AM	Bypass valve closed
2/16/2012	10:05:34 AM	H2 valve opened
2/16/2012	10:05:34 AM	BCl3 valve opened
2/16/2012	10:05:34 AM	SiCl4 pre valve opened
2/16/2012	10:05:34 AM	SiCl4 post valve opened
2/16/2012	10:05:34 AM	Bubbler valve opened
2/16/2012	10:05:34 AM	Helium MFC set to  0.000000
2/16/2012	10:05:34 AM	H2 MFC set to  450.000000
2/16/2012	10:05:34 AM	BCl3 MFC set to  1.500000
2/16/2012	10:05:34 AM	PH3 MFC set to  0.000000
2/16/2012	10:05:34 AM	SiCl4 MFC set to  50.000000
2/16/2012	10:05:34 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	10:05:35 AM	Tube furnace set to 1000
2/16/2012	10:35:35 AM	Helium valve closed
2/16/2012	10:35:35 AM	BCl3 valve closed
2/16/2012	10:35:35 AM	PH3 valve closed
2/16/2012	10:35:35 AM	SiCl4 pre valve closed
2/16/2012	10:35:35 AM	SiCl4 post valve closed
2/16/2012	10:35:35 AM	Main Vac valve closed
2/16/2012	10:35:35 AM	Bypass valve closed
2/16/2012	10:35:35 AM	H2 valve opened
2/16/2012	10:35:35 AM	Bubbler valve opened
2/16/2012	10:35:35 AM	Helium MFC set to  0.000000
2/16/2012	10:35:35 AM	H2 MFC set to  500.000000
2/16/2012	10:35:35 AM	BCl3 MFC set to  0.000000
2/16/2012	10:35:35 AM	PH3 MFC set to  0.000000
2/16/2012	10:35:35 AM	SiCl4 MFC set to  0.000000
2/16/2012	10:35:35 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	10:35:35 AM	Tube furnace set to 750
2/16/2012	10:50:35 AM	H2 valve closed
2/16/2012	10:50:35 AM	BCl3 valve closed
2/16/2012	10:50:35 AM	PH3 valve closed
2/16/2012	10:50:35 AM	SiCl4 pre valve closed
2/16/2012	10:50:35 AM	SiCl4 post valve closed
2/16/2012	10:50:35 AM	Main Vac valve closed
2/16/2012	10:50:35 AM	Bypass valve closed
2/16/2012	10:50:35 AM	Helium valve opened
2/16/2012	10:50:35 AM	Bubbler valve opened
2/16/2012	10:50:35 AM	Helium MFC set to  500.000000
2/16/2012	10:50:35 AM	H2 MFC set to  0.000000
2/16/2012	10:50:35 AM	BCl3 MFC set to  0.000000
2/16/2012	10:50:35 AM	PH3 MFC set to  0.000000
2/16/2012	10:50:35 AM	SiCl4 MFC set to  0.000000
2/16/2012	10:50:35 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	10:50:35 AM	Tube furnace set to 0
2/16/2012	11:10:35 AM	Helium valve closed
2/16/2012	11:10:35 AM	H2 valve closed
2/16/2012	11:10:35 AM	BCl3 valve closed
2/16/2012	11:10:35 AM	PH3 valve closed
2/16/2012	11:10:35 AM	SiCl4 pre valve closed
2/16/2012	11:10:35 AM	SiCl4 post valve closed
2/16/2012	11:10:35 AM	Main Vac valve closed
2/16/2012	11:10:35 AM	Bypass valve closed
2/16/2012	11:10:35 AM	Bubbler valve closed
2/16/2012	11:10:35 AM	Helium MFC set to  0.000000
2/16/2012	11:10:35 AM	H2 MFC set to  0.000000
2/16/2012	11:10:35 AM	BCl3 MFC set to  0.000000
2/16/2012	11:10:35 AM	PH3 MFC set to  0.000000
2/16/2012	11:10:35 AM	SiCl4 MFC set to  0.000000
2/16/2012	11:10:35 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:10:35 AM	Tube furnace set to 0
2/16/2012	11:24:32 AM	Run aborted at 11:24 AM
2/16/2012	11:24:32 AM	Helium valve closed
2/16/2012	11:24:32 AM	H2 valve closed
2/16/2012	11:24:32 AM	BCl3 valve closed
2/16/2012	11:24:32 AM	PH3 valve closed
2/16/2012	11:24:32 AM	SiCl4 pre valve closed
2/16/2012	11:24:32 AM	SiCl4 post valve closed
2/16/2012	11:24:32 AM	Bypass valve closed
2/16/2012	11:24:32 AM	Main Vac valve closed
2/16/2012	11:24:32 AM	Bubbler valve closed
2/16/2012	11:24:32 AM	Helium MFC set to  0.000000
2/16/2012	11:24:32 AM	H2 MFC set to  0.000000
2/16/2012	11:24:32 AM	BCl3 MFC set to  0.000000
2/16/2012	11:24:32 AM	PH3 MFC set to  0.000000
2/16/2012	11:24:32 AM	SiCl4 MFC set to  0.000000
2/16/2012	11:24:33 AM	Tube furnace set to 0
2/16/2012	11:24:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	11:24:35 AM	Recipe started at 11:24 AM
2/16/2012	11:24:35 AM	Helium valve closed
2/16/2012	11:24:35 AM	H2 valve closed
2/16/2012	11:24:35 AM	BCl3 valve closed
2/16/2012	11:24:35 AM	PH3 valve closed
2/16/2012	11:24:35 AM	SiCl4 pre valve closed
2/16/2012	11:24:35 AM	SiCl4 post valve closed
2/16/2012	11:24:35 AM	Main Vac valve closed
2/16/2012	11:24:35 AM	Bypass valve closed
2/16/2012	11:24:35 AM	Bubbler valve closed
2/16/2012	11:24:35 AM	Helium MFC set to  0.000000
2/16/2012	11:24:35 AM	H2 MFC set to  0.000000
2/16/2012	11:24:35 AM	BCl3 MFC set to  0.000000
2/16/2012	11:24:35 AM	PH3 MFC set to  0.000000
2/16/2012	11:24:35 AM	SiCl4 MFC set to  0.000000
2/16/2012	11:24:35 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:24:36 AM	Tube furnace set to 0
2/16/2012	11:24:39 AM	H2 valve closed
2/16/2012	11:24:39 AM	BCl3 valve closed
2/16/2012	11:24:39 AM	PH3 valve closed
2/16/2012	11:24:39 AM	SiCl4 pre valve closed
2/16/2012	11:24:39 AM	SiCl4 post valve closed
2/16/2012	11:24:39 AM	Main Vac valve closed
2/16/2012	11:24:39 AM	Bypass valve closed
2/16/2012	11:24:39 AM	Bubbler valve closed
2/16/2012	11:24:39 AM	Helium valve opened
2/16/2012	11:24:39 AM	Helium MFC set to  500.000000
2/16/2012	11:24:39 AM	H2 MFC set to  0.000000
2/16/2012	11:24:39 AM	BCl3 MFC set to  0.000000
2/16/2012	11:24:39 AM	PH3 MFC set to  0.000000
2/16/2012	11:24:39 AM	SiCl4 MFC set to  0.000000
2/16/2012	11:24:39 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:24:39 AM	Tube furnace set to 0
2/16/2012	11:24:44 AM	Helium valve closed
2/16/2012	11:24:44 AM	H2 valve closed
2/16/2012	11:24:44 AM	BCl3 valve closed
2/16/2012	11:24:44 AM	PH3 valve closed
2/16/2012	11:24:44 AM	SiCl4 pre valve closed
2/16/2012	11:24:44 AM	SiCl4 post valve closed
2/16/2012	11:24:44 AM	Main Vac valve closed
2/16/2012	11:24:44 AM	Bypass valve closed
2/16/2012	11:24:44 AM	Bubbler valve closed
2/16/2012	11:24:44 AM	Helium MFC set to  0.000000
2/16/2012	11:24:44 AM	H2 MFC set to  0.000000
2/16/2012	11:24:44 AM	BCl3 MFC set to  0.000000
2/16/2012	11:24:44 AM	PH3 MFC set to  0.000000
2/16/2012	11:24:44 AM	SiCl4 MFC set to  0.000000
2/16/2012	11:24:44 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:24:44 AM	Tube furnace set to 0
2/16/2012	11:24:45 AM	Run finished at 11:24 AM
2/16/2012	11:24:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	11:31:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	11:31:42 AM	Recipe started at 11:31 AM
2/16/2012	11:31:42 AM	Helium valve closed
2/16/2012	11:31:42 AM	H2 valve closed
2/16/2012	11:31:42 AM	BCl3 valve closed
2/16/2012	11:31:42 AM	PH3 valve closed
2/16/2012	11:31:42 AM	SiCl4 pre valve closed
2/16/2012	11:31:42 AM	SiCl4 post valve closed
2/16/2012	11:31:42 AM	Main Vac valve closed
2/16/2012	11:31:42 AM	Bubbler valve closed
2/16/2012	11:31:42 AM	Bypass valve opened
2/16/2012	11:31:42 AM	Helium MFC set to  0.000000
2/16/2012	11:31:42 AM	H2 MFC set to  0.000000
2/16/2012	11:31:42 AM	BCl3 MFC set to  0.000000
2/16/2012	11:31:42 AM	PH3 MFC set to  0.000000
2/16/2012	11:31:42 AM	SiCl4 MFC set to  0.000000
2/16/2012	11:31:42 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:31:42 AM	Tube furnace set to 0
2/16/2012	11:32:44 AM	Helium valve closed
2/16/2012	11:32:44 AM	H2 valve closed
2/16/2012	11:32:44 AM	BCl3 valve closed
2/16/2012	11:32:44 AM	PH3 valve closed
2/16/2012	11:32:44 AM	SiCl4 pre valve closed
2/16/2012	11:32:44 AM	SiCl4 post valve closed
2/16/2012	11:32:44 AM	Main Vac valve closed
2/16/2012	11:32:44 AM	Bubbler valve closed
2/16/2012	11:32:44 AM	Bypass valve opened
2/16/2012	11:32:44 AM	Helium MFC set to  0.000000
2/16/2012	11:32:44 AM	H2 MFC set to  0.000000
2/16/2012	11:32:44 AM	BCl3 MFC set to  0.000000
2/16/2012	11:32:44 AM	PH3 MFC set to  0.000000
2/16/2012	11:32:44 AM	SiCl4 MFC set to  0.000000
2/16/2012	11:32:44 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:32:44 AM	Tube furnace set to 0
2/16/2012	11:33:44 AM	Helium valve closed
2/16/2012	11:33:44 AM	H2 valve closed
2/16/2012	11:33:44 AM	BCl3 valve closed
2/16/2012	11:33:44 AM	PH3 valve closed
2/16/2012	11:33:44 AM	SiCl4 pre valve closed
2/16/2012	11:33:44 AM	SiCl4 post valve closed
2/16/2012	11:33:44 AM	Bypass valve closed
2/16/2012	11:33:44 AM	Bubbler valve closed
2/16/2012	11:33:44 AM	Main Vac valve opened
2/16/2012	11:33:44 AM	Helium MFC set to  0.000000
2/16/2012	11:33:44 AM	H2 MFC set to  0.000000
2/16/2012	11:33:44 AM	BCl3 MFC set to  0.000000
2/16/2012	11:33:44 AM	PH3 MFC set to  0.000000
2/16/2012	11:33:44 AM	SiCl4 MFC set to  0.000000
2/16/2012	11:33:44 AM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:33:44 AM	Tube furnace set to 0
2/16/2012	11:33:45 AM	Run finished at 11:33 AM
2/16/2012	11:33:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	1:20:29 PM	Main Vac valve closed
2/16/2012	1:21:00 PM	Main Vac valve opened
2/16/2012	1:23:29 PM	Recipe started at 1:23 PM
2/16/2012	1:23:29 PM	Helium valve closed
2/16/2012	1:23:29 PM	H2 valve closed
2/16/2012	1:23:29 PM	BCl3 valve closed
2/16/2012	1:23:29 PM	PH3 valve closed
2/16/2012	1:23:29 PM	SiCl4 pre valve closed
2/16/2012	1:23:29 PM	SiCl4 post valve closed
2/16/2012	1:23:29 PM	Main Vac valve closed
2/16/2012	1:23:29 PM	Bypass valve closed
2/16/2012	1:23:29 PM	Bubbler valve closed
2/16/2012	1:23:29 PM	Helium MFC set to  0.000000
2/16/2012	1:23:29 PM	H2 MFC set to  0.000000
2/16/2012	1:23:29 PM	BCl3 MFC set to  0.000000
2/16/2012	1:23:29 PM	PH3 MFC set to  0.000000
2/16/2012	1:23:29 PM	SiCl4 MFC set to  0.000000
2/16/2012	1:23:29 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:23:29 PM	Tube furnace set to 0
2/16/2012	1:23:32 PM	Helium valve closed
2/16/2012	1:23:32 PM	BCl3 valve closed
2/16/2012	1:23:32 PM	PH3 valve closed
2/16/2012	1:23:32 PM	SiCl4 pre valve closed
2/16/2012	1:23:32 PM	SiCl4 post valve closed
2/16/2012	1:23:32 PM	Main Vac valve closed
2/16/2012	1:23:32 PM	Bypass valve closed
2/16/2012	1:23:32 PM	Bubbler valve closed
2/16/2012	1:23:32 PM	H2 valve opened
2/16/2012	1:23:32 PM	Helium MFC set to  0.000000
2/16/2012	1:23:32 PM	H2 MFC set to  500.000000
2/16/2012	1:23:32 PM	BCl3 MFC set to  0.000000
2/16/2012	1:23:32 PM	PH3 MFC set to  0.000000
2/16/2012	1:23:32 PM	SiCl4 MFC set to  0.000000
2/16/2012	1:23:32 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:23:32 PM	Tube furnace set to 0
2/16/2012	1:24:38 PM	Helium valve closed
2/16/2012	1:24:38 PM	BCl3 valve closed
2/16/2012	1:24:38 PM	PH3 valve closed
2/16/2012	1:24:38 PM	SiCl4 pre valve closed
2/16/2012	1:24:38 PM	SiCl4 post valve closed
2/16/2012	1:24:38 PM	Main Vac valve closed
2/16/2012	1:24:38 PM	Bypass valve closed
2/16/2012	1:24:38 PM	H2 valve opened
2/16/2012	1:24:38 PM	Bubbler valve opened
2/16/2012	1:24:38 PM	Helium MFC set to  0.000000
2/16/2012	1:24:38 PM	H2 MFC set to  500.000000
2/16/2012	1:24:38 PM	BCl3 MFC set to  0.000000
2/16/2012	1:24:38 PM	PH3 MFC set to  0.000000
2/16/2012	1:24:38 PM	SiCl4 MFC set to  0.000000
2/16/2012	1:24:38 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:24:38 PM	Tube furnace set to 0
2/16/2012	1:24:39 PM	Helium valve closed
2/16/2012	1:24:39 PM	BCl3 valve closed
2/16/2012	1:24:39 PM	PH3 valve closed
2/16/2012	1:24:39 PM	SiCl4 pre valve closed
2/16/2012	1:24:39 PM	SiCl4 post valve closed
2/16/2012	1:24:39 PM	Main Vac valve closed
2/16/2012	1:24:39 PM	Bypass valve closed
2/16/2012	1:24:39 PM	H2 valve opened
2/16/2012	1:24:39 PM	Bubbler valve opened
2/16/2012	1:24:39 PM	Helium MFC set to  0.000000
2/16/2012	1:24:39 PM	H2 MFC set to  500.000000
2/16/2012	1:24:39 PM	BCl3 MFC set to  0.000000
2/16/2012	1:24:39 PM	PH3 MFC set to  0.000000
2/16/2012	1:24:39 PM	SiCl4 MFC set to  0.000000
2/16/2012	1:24:39 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:24:39 PM	Tube furnace set to 1000
2/16/2012	1:49:40 PM	Helium valve closed
2/16/2012	1:49:40 PM	PH3 valve closed
2/16/2012	1:49:40 PM	Main Vac valve closed
2/16/2012	1:49:40 PM	Bypass valve closed
2/16/2012	1:49:40 PM	H2 valve opened
2/16/2012	1:49:40 PM	BCl3 valve opened
2/16/2012	1:49:40 PM	SiCl4 pre valve opened
2/16/2012	1:49:40 PM	SiCl4 post valve opened
2/16/2012	1:49:40 PM	Bubbler valve opened
2/16/2012	1:49:40 PM	Helium MFC set to  0.000000
2/16/2012	1:49:40 PM	H2 MFC set to  450.000000
2/16/2012	1:49:40 PM	BCl3 MFC set to  1.500000
2/16/2012	1:49:40 PM	PH3 MFC set to  0.000000
2/16/2012	1:49:40 PM	SiCl4 MFC set to  50.000000
2/16/2012	1:49:40 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	1:49:40 PM	Tube furnace set to 1000
2/16/2012	2:05:40 PM	Helium valve closed
2/16/2012	2:05:40 PM	BCl3 valve closed
2/16/2012	2:05:40 PM	PH3 valve closed
2/16/2012	2:05:40 PM	SiCl4 pre valve closed
2/16/2012	2:05:40 PM	SiCl4 post valve closed
2/16/2012	2:05:40 PM	Main Vac valve closed
2/16/2012	2:05:40 PM	Bypass valve closed
2/16/2012	2:05:40 PM	H2 valve opened
2/16/2012	2:05:40 PM	Bubbler valve opened
2/16/2012	2:05:40 PM	Helium MFC set to  0.000000
2/16/2012	2:05:40 PM	H2 MFC set to  500.000000
2/16/2012	2:05:40 PM	BCl3 MFC set to  0.000000
2/16/2012	2:05:40 PM	PH3 MFC set to  0.000000
2/16/2012	2:05:40 PM	SiCl4 MFC set to  0.000000
2/16/2012	2:05:40 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:05:40 PM	Tube furnace set to 750
2/16/2012	2:20:40 PM	H2 valve closed
2/16/2012	2:20:40 PM	BCl3 valve closed
2/16/2012	2:20:40 PM	PH3 valve closed
2/16/2012	2:20:40 PM	SiCl4 pre valve closed
2/16/2012	2:20:40 PM	SiCl4 post valve closed
2/16/2012	2:20:40 PM	Main Vac valve closed
2/16/2012	2:20:40 PM	Bypass valve closed
2/16/2012	2:20:40 PM	Helium valve opened
2/16/2012	2:20:40 PM	Bubbler valve opened
2/16/2012	2:20:40 PM	Helium MFC set to  500.000000
2/16/2012	2:20:40 PM	H2 MFC set to  0.000000
2/16/2012	2:20:40 PM	BCl3 MFC set to  0.000000
2/16/2012	2:20:40 PM	PH3 MFC set to  0.000000
2/16/2012	2:20:40 PM	SiCl4 MFC set to  0.000000
2/16/2012	2:20:40 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:20:40 PM	Tube furnace set to 0
2/16/2012	2:40:40 PM	Helium valve closed
2/16/2012	2:40:40 PM	H2 valve closed
2/16/2012	2:40:40 PM	BCl3 valve closed
2/16/2012	2:40:40 PM	PH3 valve closed
2/16/2012	2:40:40 PM	SiCl4 pre valve closed
2/16/2012	2:40:40 PM	SiCl4 post valve closed
2/16/2012	2:40:40 PM	Main Vac valve closed
2/16/2012	2:40:40 PM	Bypass valve closed
2/16/2012	2:40:40 PM	Bubbler valve closed
2/16/2012	2:40:40 PM	Helium MFC set to  0.000000
2/16/2012	2:40:40 PM	H2 MFC set to  0.000000
2/16/2012	2:40:40 PM	BCl3 MFC set to  0.000000
2/16/2012	2:40:40 PM	PH3 MFC set to  0.000000
2/16/2012	2:40:40 PM	SiCl4 MFC set to  0.000000
2/16/2012	2:40:40 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:40:40 PM	Tube furnace set to 0
2/16/2012	2:51:17 PM	Run aborted at 2:51 PM
2/16/2012	2:51:17 PM	Helium valve closed
2/16/2012	2:51:17 PM	H2 valve closed
2/16/2012	2:51:17 PM	BCl3 valve closed
2/16/2012	2:51:17 PM	PH3 valve closed
2/16/2012	2:51:17 PM	SiCl4 pre valve closed
2/16/2012	2:51:17 PM	SiCl4 post valve closed
2/16/2012	2:51:17 PM	Bypass valve closed
2/16/2012	2:51:17 PM	Main Vac valve closed
2/16/2012	2:51:17 PM	Bubbler valve closed
2/16/2012	2:51:17 PM	Helium MFC set to  0.000000
2/16/2012	2:51:17 PM	H2 MFC set to  0.000000
2/16/2012	2:51:17 PM	BCl3 MFC set to  0.000000
2/16/2012	2:51:17 PM	PH3 MFC set to  0.000000
2/16/2012	2:51:17 PM	SiCl4 MFC set to  0.000000
2/16/2012	2:51:17 PM	Tube furnace set to 0
2/16/2012	2:51:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	2:51:20 PM	Recipe started at 2:51 PM
2/16/2012	2:51:20 PM	Helium valve closed
2/16/2012	2:51:20 PM	H2 valve closed
2/16/2012	2:51:20 PM	BCl3 valve closed
2/16/2012	2:51:20 PM	PH3 valve closed
2/16/2012	2:51:20 PM	SiCl4 pre valve closed
2/16/2012	2:51:20 PM	SiCl4 post valve closed
2/16/2012	2:51:20 PM	Main Vac valve closed
2/16/2012	2:51:20 PM	Bypass valve closed
2/16/2012	2:51:20 PM	Bubbler valve closed
2/16/2012	2:51:20 PM	Helium MFC set to  0.000000
2/16/2012	2:51:20 PM	H2 MFC set to  0.000000
2/16/2012	2:51:20 PM	BCl3 MFC set to  0.000000
2/16/2012	2:51:20 PM	PH3 MFC set to  0.000000
2/16/2012	2:51:20 PM	SiCl4 MFC set to  0.000000
2/16/2012	2:51:20 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:51:20 PM	Tube furnace set to 0
2/16/2012	2:51:23 PM	H2 valve closed
2/16/2012	2:51:23 PM	BCl3 valve closed
2/16/2012	2:51:23 PM	PH3 valve closed
2/16/2012	2:51:23 PM	SiCl4 pre valve closed
2/16/2012	2:51:23 PM	SiCl4 post valve closed
2/16/2012	2:51:23 PM	Main Vac valve closed
2/16/2012	2:51:23 PM	Bypass valve closed
2/16/2012	2:51:23 PM	Bubbler valve closed
2/16/2012	2:51:23 PM	Helium valve opened
2/16/2012	2:51:23 PM	Helium MFC set to  500.000000
2/16/2012	2:51:23 PM	H2 MFC set to  0.000000
2/16/2012	2:51:23 PM	BCl3 MFC set to  0.000000
2/16/2012	2:51:23 PM	PH3 MFC set to  0.000000
2/16/2012	2:51:23 PM	SiCl4 MFC set to  0.000000
2/16/2012	2:51:23 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:51:24 PM	Tube furnace set to 0
2/16/2012	2:51:28 PM	Helium valve closed
2/16/2012	2:51:28 PM	H2 valve closed
2/16/2012	2:51:28 PM	BCl3 valve closed
2/16/2012	2:51:28 PM	PH3 valve closed
2/16/2012	2:51:28 PM	SiCl4 pre valve closed
2/16/2012	2:51:28 PM	SiCl4 post valve closed
2/16/2012	2:51:28 PM	Main Vac valve closed
2/16/2012	2:51:28 PM	Bypass valve closed
2/16/2012	2:51:28 PM	Bubbler valve closed
2/16/2012	2:51:28 PM	Helium MFC set to  0.000000
2/16/2012	2:51:28 PM	H2 MFC set to  0.000000
2/16/2012	2:51:28 PM	BCl3 MFC set to  0.000000
2/16/2012	2:51:28 PM	PH3 MFC set to  0.000000
2/16/2012	2:51:28 PM	SiCl4 MFC set to  0.000000
2/16/2012	2:51:28 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:51:28 PM	Tube furnace set to 0
2/16/2012	2:51:29 PM	Run finished at 2:51 PM
2/16/2012	2:51:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	2:57:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	2:57:34 PM	Recipe started at 2:57 PM
2/16/2012	2:57:34 PM	Helium valve closed
2/16/2012	2:57:34 PM	H2 valve closed
2/16/2012	2:57:34 PM	BCl3 valve closed
2/16/2012	2:57:34 PM	PH3 valve closed
2/16/2012	2:57:34 PM	SiCl4 pre valve closed
2/16/2012	2:57:34 PM	SiCl4 post valve closed
2/16/2012	2:57:34 PM	Main Vac valve closed
2/16/2012	2:57:34 PM	Bubbler valve closed
2/16/2012	2:57:34 PM	Bypass valve opened
2/16/2012	2:57:34 PM	Helium MFC set to  0.000000
2/16/2012	2:57:34 PM	H2 MFC set to  0.000000
2/16/2012	2:57:34 PM	BCl3 MFC set to  0.000000
2/16/2012	2:57:34 PM	PH3 MFC set to  0.000000
2/16/2012	2:57:34 PM	SiCl4 MFC set to  0.000000
2/16/2012	2:57:34 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:57:34 PM	Tube furnace set to 0
2/16/2012	2:58:35 PM	Helium valve closed
2/16/2012	2:58:35 PM	H2 valve closed
2/16/2012	2:58:35 PM	BCl3 valve closed
2/16/2012	2:58:35 PM	PH3 valve closed
2/16/2012	2:58:35 PM	SiCl4 pre valve closed
2/16/2012	2:58:35 PM	SiCl4 post valve closed
2/16/2012	2:58:35 PM	Main Vac valve closed
2/16/2012	2:58:35 PM	Bubbler valve closed
2/16/2012	2:58:35 PM	Bypass valve opened
2/16/2012	2:58:35 PM	Helium MFC set to  0.000000
2/16/2012	2:58:35 PM	H2 MFC set to  0.000000
2/16/2012	2:58:35 PM	BCl3 MFC set to  0.000000
2/16/2012	2:58:35 PM	PH3 MFC set to  0.000000
2/16/2012	2:58:35 PM	SiCl4 MFC set to  0.000000
2/16/2012	2:58:35 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:58:36 PM	Tube furnace set to 0
2/16/2012	2:59:36 PM	Helium valve closed
2/16/2012	2:59:36 PM	H2 valve closed
2/16/2012	2:59:36 PM	BCl3 valve closed
2/16/2012	2:59:36 PM	PH3 valve closed
2/16/2012	2:59:36 PM	SiCl4 pre valve closed
2/16/2012	2:59:36 PM	SiCl4 post valve closed
2/16/2012	2:59:36 PM	Bypass valve closed
2/16/2012	2:59:36 PM	Bubbler valve closed
2/16/2012	2:59:36 PM	Main Vac valve opened
2/16/2012	2:59:36 PM	Helium MFC set to  0.000000
2/16/2012	2:59:36 PM	H2 MFC set to  0.000000
2/16/2012	2:59:36 PM	BCl3 MFC set to  0.000000
2/16/2012	2:59:36 PM	PH3 MFC set to  0.000000
2/16/2012	2:59:36 PM	SiCl4 MFC set to  0.000000
2/16/2012	2:59:36 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	2:59:36 PM	Tube furnace set to 0
2/16/2012	2:59:37 PM	Run finished at 2:59 PM
2/16/2012	2:59:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	4:35:48 PM	Main Vac valve closed
2/16/2012	4:36:07 PM	Main Vac valve opened
2/16/2012	4:36:34 PM	Recipe started at 4:36 PM
2/16/2012	4:36:34 PM	Helium valve closed
2/16/2012	4:36:34 PM	H2 valve closed
2/16/2012	4:36:34 PM	BCl3 valve closed
2/16/2012	4:36:34 PM	PH3 valve closed
2/16/2012	4:36:34 PM	SiCl4 pre valve closed
2/16/2012	4:36:34 PM	SiCl4 post valve closed
2/16/2012	4:36:34 PM	Main Vac valve closed
2/16/2012	4:36:34 PM	Bypass valve closed
2/16/2012	4:36:34 PM	Bubbler valve closed
2/16/2012	4:36:34 PM	Helium MFC set to  0.000000
2/16/2012	4:36:34 PM	H2 MFC set to  0.000000
2/16/2012	4:36:34 PM	BCl3 MFC set to  0.000000
2/16/2012	4:36:34 PM	PH3 MFC set to  0.000000
2/16/2012	4:36:34 PM	SiCl4 MFC set to  0.000000
2/16/2012	4:36:34 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	4:36:34 PM	Tube furnace set to 0
2/16/2012	4:36:37 PM	Helium valve closed
2/16/2012	4:36:37 PM	BCl3 valve closed
2/16/2012	4:36:37 PM	PH3 valve closed
2/16/2012	4:36:37 PM	SiCl4 pre valve closed
2/16/2012	4:36:37 PM	SiCl4 post valve closed
2/16/2012	4:36:37 PM	Main Vac valve closed
2/16/2012	4:36:37 PM	Bypass valve closed
2/16/2012	4:36:37 PM	Bubbler valve closed
2/16/2012	4:36:37 PM	H2 valve opened
2/16/2012	4:36:37 PM	Helium MFC set to  0.000000
2/16/2012	4:36:37 PM	H2 MFC set to  500.000000
2/16/2012	4:36:37 PM	BCl3 MFC set to  0.000000
2/16/2012	4:36:37 PM	PH3 MFC set to  0.000000
2/16/2012	4:36:37 PM	SiCl4 MFC set to  0.000000
2/16/2012	4:36:37 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	4:36:37 PM	Tube furnace set to 0
2/16/2012	4:37:43 PM	Helium valve closed
2/16/2012	4:37:43 PM	BCl3 valve closed
2/16/2012	4:37:43 PM	PH3 valve closed
2/16/2012	4:37:43 PM	SiCl4 pre valve closed
2/16/2012	4:37:43 PM	SiCl4 post valve closed
2/16/2012	4:37:43 PM	Main Vac valve closed
2/16/2012	4:37:43 PM	Bypass valve closed
2/16/2012	4:37:43 PM	H2 valve opened
2/16/2012	4:37:43 PM	Bubbler valve opened
2/16/2012	4:37:43 PM	Helium MFC set to  0.000000
2/16/2012	4:37:43 PM	H2 MFC set to  500.000000
2/16/2012	4:37:43 PM	BCl3 MFC set to  0.000000
2/16/2012	4:37:43 PM	PH3 MFC set to  0.000000
2/16/2012	4:37:43 PM	SiCl4 MFC set to  0.000000
2/16/2012	4:37:43 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	4:37:43 PM	Tube furnace set to 0
2/16/2012	4:37:44 PM	Helium valve closed
2/16/2012	4:37:44 PM	BCl3 valve closed
2/16/2012	4:37:44 PM	PH3 valve closed
2/16/2012	4:37:44 PM	SiCl4 pre valve closed
2/16/2012	4:37:44 PM	SiCl4 post valve closed
2/16/2012	4:37:44 PM	Main Vac valve closed
2/16/2012	4:37:44 PM	Bypass valve closed
2/16/2012	4:37:44 PM	H2 valve opened
2/16/2012	4:37:44 PM	Bubbler valve opened
2/16/2012	4:37:44 PM	Helium MFC set to  0.000000
2/16/2012	4:37:44 PM	H2 MFC set to  500.000000
2/16/2012	4:37:44 PM	BCl3 MFC set to  0.000000
2/16/2012	4:37:44 PM	PH3 MFC set to  0.000000
2/16/2012	4:37:44 PM	SiCl4 MFC set to  0.000000
2/16/2012	4:37:44 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	4:37:44 PM	Tube furnace set to 1000
2/16/2012	5:02:44 PM	Helium valve closed
2/16/2012	5:02:44 PM	PH3 valve closed
2/16/2012	5:02:44 PM	Main Vac valve closed
2/16/2012	5:02:44 PM	Bypass valve closed
2/16/2012	5:02:44 PM	H2 valve opened
2/16/2012	5:02:44 PM	BCl3 valve opened
2/16/2012	5:02:44 PM	SiCl4 pre valve opened
2/16/2012	5:02:44 PM	SiCl4 post valve opened
2/16/2012	5:02:44 PM	Bubbler valve opened
2/16/2012	5:02:44 PM	Helium MFC set to  0.000000
2/16/2012	5:02:44 PM	H2 MFC set to  450.000000
2/16/2012	5:02:44 PM	BCl3 MFC set to  1.500000
2/16/2012	5:02:44 PM	PH3 MFC set to  0.000000
2/16/2012	5:02:44 PM	SiCl4 MFC set to  50.000000
2/16/2012	5:02:44 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	5:02:44 PM	Tube furnace set to 1000
2/16/2012	5:20:44 PM	Helium valve closed
2/16/2012	5:20:44 PM	BCl3 valve closed
2/16/2012	5:20:44 PM	PH3 valve closed
2/16/2012	5:20:44 PM	SiCl4 pre valve closed
2/16/2012	5:20:44 PM	SiCl4 post valve closed
2/16/2012	5:20:44 PM	Main Vac valve closed
2/16/2012	5:20:44 PM	Bypass valve closed
2/16/2012	5:20:44 PM	H2 valve opened
2/16/2012	5:20:44 PM	Bubbler valve opened
2/16/2012	5:20:44 PM	Helium MFC set to  0.000000
2/16/2012	5:20:44 PM	H2 MFC set to  500.000000
2/16/2012	5:20:44 PM	BCl3 MFC set to  0.000000
2/16/2012	5:20:44 PM	PH3 MFC set to  0.000000
2/16/2012	5:20:44 PM	SiCl4 MFC set to  0.000000
2/16/2012	5:20:44 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	5:20:44 PM	Tube furnace set to 750
2/16/2012	5:35:44 PM	H2 valve closed
2/16/2012	5:35:44 PM	BCl3 valve closed
2/16/2012	5:35:44 PM	PH3 valve closed
2/16/2012	5:35:44 PM	SiCl4 pre valve closed
2/16/2012	5:35:44 PM	SiCl4 post valve closed
2/16/2012	5:35:44 PM	Main Vac valve closed
2/16/2012	5:35:44 PM	Bypass valve closed
2/16/2012	5:35:44 PM	Helium valve opened
2/16/2012	5:35:44 PM	Bubbler valve opened
2/16/2012	5:35:44 PM	Helium MFC set to  500.000000
2/16/2012	5:35:44 PM	H2 MFC set to  0.000000
2/16/2012	5:35:44 PM	BCl3 MFC set to  0.000000
2/16/2012	5:35:44 PM	PH3 MFC set to  0.000000
2/16/2012	5:35:44 PM	SiCl4 MFC set to  0.000000
2/16/2012	5:35:44 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	5:35:44 PM	Tube furnace set to 0
2/16/2012	5:55:44 PM	Helium valve closed
2/16/2012	5:55:44 PM	H2 valve closed
2/16/2012	5:55:44 PM	BCl3 valve closed
2/16/2012	5:55:44 PM	PH3 valve closed
2/16/2012	5:55:44 PM	SiCl4 pre valve closed
2/16/2012	5:55:44 PM	SiCl4 post valve closed
2/16/2012	5:55:44 PM	Main Vac valve closed
2/16/2012	5:55:44 PM	Bypass valve closed
2/16/2012	5:55:44 PM	Bubbler valve closed
2/16/2012	5:55:44 PM	Helium MFC set to  0.000000
2/16/2012	5:55:44 PM	H2 MFC set to  0.000000
2/16/2012	5:55:44 PM	BCl3 MFC set to  0.000000
2/16/2012	5:55:44 PM	PH3 MFC set to  0.000000
2/16/2012	5:55:44 PM	SiCl4 MFC set to  0.000000
2/16/2012	5:55:44 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	5:55:45 PM	Tube furnace set to 0
2/16/2012	6:01:19 PM	Run aborted at 6:01 PM
2/16/2012	6:01:19 PM	Helium valve closed
2/16/2012	6:01:19 PM	H2 valve closed
2/16/2012	6:01:19 PM	BCl3 valve closed
2/16/2012	6:01:19 PM	PH3 valve closed
2/16/2012	6:01:19 PM	SiCl4 pre valve closed
2/16/2012	6:01:19 PM	SiCl4 post valve closed
2/16/2012	6:01:19 PM	Bypass valve closed
2/16/2012	6:01:19 PM	Main Vac valve closed
2/16/2012	6:01:19 PM	Bubbler valve closed
2/16/2012	6:01:19 PM	Helium MFC set to  0.000000
2/16/2012	6:01:19 PM	H2 MFC set to  0.000000
2/16/2012	6:01:19 PM	BCl3 MFC set to  0.000000
2/16/2012	6:01:19 PM	PH3 MFC set to  0.000000
2/16/2012	6:01:19 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:01:20 PM	Tube furnace set to 0
2/16/2012	6:01:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	6:01:40 PM	Recipe started at 6:01 PM
2/16/2012	6:01:40 PM	Helium valve closed
2/16/2012	6:01:40 PM	H2 valve closed
2/16/2012	6:01:40 PM	BCl3 valve closed
2/16/2012	6:01:40 PM	PH3 valve closed
2/16/2012	6:01:40 PM	SiCl4 pre valve closed
2/16/2012	6:01:40 PM	SiCl4 post valve closed
2/16/2012	6:01:40 PM	Main Vac valve closed
2/16/2012	6:01:40 PM	Bypass valve closed
2/16/2012	6:01:40 PM	Bubbler valve closed
2/16/2012	6:01:40 PM	Helium MFC set to  0.000000
2/16/2012	6:01:40 PM	H2 MFC set to  0.000000
2/16/2012	6:01:40 PM	BCl3 MFC set to  0.000000
2/16/2012	6:01:40 PM	PH3 MFC set to  0.000000
2/16/2012	6:01:40 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:01:40 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:01:40 PM	Tube furnace set to 0
2/16/2012	6:01:43 PM	H2 valve closed
2/16/2012	6:01:43 PM	BCl3 valve closed
2/16/2012	6:01:43 PM	PH3 valve closed
2/16/2012	6:01:43 PM	SiCl4 pre valve closed
2/16/2012	6:01:43 PM	SiCl4 post valve closed
2/16/2012	6:01:43 PM	Main Vac valve closed
2/16/2012	6:01:43 PM	Bypass valve closed
2/16/2012	6:01:43 PM	Bubbler valve closed
2/16/2012	6:01:43 PM	Helium valve opened
2/16/2012	6:01:43 PM	Helium MFC set to  500.000000
2/16/2012	6:01:43 PM	H2 MFC set to  0.000000
2/16/2012	6:01:43 PM	BCl3 MFC set to  0.000000
2/16/2012	6:01:43 PM	PH3 MFC set to  0.000000
2/16/2012	6:01:43 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:01:43 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:01:44 PM	Tube furnace set to 0
2/16/2012	6:01:44 PM	Helium valve closed
2/16/2012	6:01:44 PM	H2 valve closed
2/16/2012	6:01:44 PM	BCl3 valve closed
2/16/2012	6:01:44 PM	PH3 valve closed
2/16/2012	6:01:44 PM	SiCl4 pre valve closed
2/16/2012	6:01:44 PM	SiCl4 post valve closed
2/16/2012	6:01:44 PM	Main Vac valve closed
2/16/2012	6:01:44 PM	Bypass valve closed
2/16/2012	6:01:44 PM	Bubbler valve closed
2/16/2012	6:01:44 PM	Helium MFC set to  0.000000
2/16/2012	6:01:44 PM	H2 MFC set to  0.000000
2/16/2012	6:01:44 PM	BCl3 MFC set to  0.000000
2/16/2012	6:01:44 PM	PH3 MFC set to  0.000000
2/16/2012	6:01:44 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:01:44 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:01:44 PM	Tube furnace set to 0
2/16/2012	6:01:45 PM	Run finished at 6:01 PM
2/16/2012	6:01:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	6:06:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	6:06:57 PM	Recipe started at 6:06 PM
2/16/2012	6:06:57 PM	Helium valve closed
2/16/2012	6:06:57 PM	H2 valve closed
2/16/2012	6:06:57 PM	BCl3 valve closed
2/16/2012	6:06:57 PM	PH3 valve closed
2/16/2012	6:06:57 PM	SiCl4 pre valve closed
2/16/2012	6:06:57 PM	SiCl4 post valve closed
2/16/2012	6:06:57 PM	Main Vac valve closed
2/16/2012	6:06:57 PM	Bypass valve closed
2/16/2012	6:06:57 PM	Bubbler valve closed
2/16/2012	6:06:57 PM	Helium MFC set to  0.000000
2/16/2012	6:06:57 PM	H2 MFC set to  0.000000
2/16/2012	6:06:57 PM	BCl3 MFC set to  0.000000
2/16/2012	6:06:57 PM	PH3 MFC set to  0.000000
2/16/2012	6:06:57 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:06:57 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:06:57 PM	Tube furnace set to 0
2/16/2012	6:07:00 PM	H2 valve closed
2/16/2012	6:07:00 PM	BCl3 valve closed
2/16/2012	6:07:00 PM	PH3 valve closed
2/16/2012	6:07:00 PM	SiCl4 pre valve closed
2/16/2012	6:07:00 PM	SiCl4 post valve closed
2/16/2012	6:07:00 PM	Main Vac valve closed
2/16/2012	6:07:00 PM	Bypass valve closed
2/16/2012	6:07:00 PM	Bubbler valve closed
2/16/2012	6:07:00 PM	Helium valve opened
2/16/2012	6:07:00 PM	Helium MFC set to  500.000000
2/16/2012	6:07:00 PM	H2 MFC set to  0.000000
2/16/2012	6:07:00 PM	BCl3 MFC set to  0.000000
2/16/2012	6:07:00 PM	PH3 MFC set to  0.000000
2/16/2012	6:07:00 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:07:00 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:07:00 PM	Tube furnace set to 0
2/16/2012	6:07:04 PM	Helium valve closed
2/16/2012	6:07:04 PM	H2 valve closed
2/16/2012	6:07:04 PM	BCl3 valve closed
2/16/2012	6:07:04 PM	PH3 valve closed
2/16/2012	6:07:04 PM	SiCl4 pre valve closed
2/16/2012	6:07:04 PM	SiCl4 post valve closed
2/16/2012	6:07:04 PM	Main Vac valve closed
2/16/2012	6:07:04 PM	Bypass valve closed
2/16/2012	6:07:04 PM	Bubbler valve closed
2/16/2012	6:07:04 PM	Helium MFC set to  0.000000
2/16/2012	6:07:04 PM	H2 MFC set to  0.000000
2/16/2012	6:07:04 PM	BCl3 MFC set to  0.000000
2/16/2012	6:07:04 PM	PH3 MFC set to  0.000000
2/16/2012	6:07:04 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:07:04 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:07:04 PM	Tube furnace set to 0
2/16/2012	6:07:05 PM	Run finished at 6:07 PM
2/16/2012	6:07:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	6:09:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	6:09:09 PM	Recipe started at 6:09 PM
2/16/2012	6:09:09 PM	Helium valve closed
2/16/2012	6:09:09 PM	H2 valve closed
2/16/2012	6:09:09 PM	BCl3 valve closed
2/16/2012	6:09:09 PM	PH3 valve closed
2/16/2012	6:09:09 PM	SiCl4 pre valve closed
2/16/2012	6:09:09 PM	SiCl4 post valve closed
2/16/2012	6:09:09 PM	Main Vac valve closed
2/16/2012	6:09:09 PM	Bypass valve closed
2/16/2012	6:09:09 PM	Bubbler valve closed
2/16/2012	6:09:09 PM	Helium MFC set to  0.000000
2/16/2012	6:09:09 PM	H2 MFC set to  0.000000
2/16/2012	6:09:09 PM	BCl3 MFC set to  0.000000
2/16/2012	6:09:09 PM	PH3 MFC set to  0.000000
2/16/2012	6:09:09 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:09:09 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:09:09 PM	Tube furnace set to 0
2/16/2012	6:09:12 PM	H2 valve closed
2/16/2012	6:09:12 PM	BCl3 valve closed
2/16/2012	6:09:12 PM	PH3 valve closed
2/16/2012	6:09:12 PM	SiCl4 pre valve closed
2/16/2012	6:09:12 PM	SiCl4 post valve closed
2/16/2012	6:09:12 PM	Main Vac valve closed
2/16/2012	6:09:12 PM	Bypass valve closed
2/16/2012	6:09:12 PM	Bubbler valve closed
2/16/2012	6:09:12 PM	Helium valve opened
2/16/2012	6:09:12 PM	Helium MFC set to  500.000000
2/16/2012	6:09:12 PM	H2 MFC set to  0.000000
2/16/2012	6:09:12 PM	BCl3 MFC set to  0.000000
2/16/2012	6:09:12 PM	PH3 MFC set to  0.000000
2/16/2012	6:09:12 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:09:12 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:09:12 PM	Tube furnace set to 0
2/16/2012	6:09:13 PM	Helium valve closed
2/16/2012	6:09:13 PM	H2 valve closed
2/16/2012	6:09:13 PM	BCl3 valve closed
2/16/2012	6:09:13 PM	PH3 valve closed
2/16/2012	6:09:13 PM	SiCl4 pre valve closed
2/16/2012	6:09:13 PM	SiCl4 post valve closed
2/16/2012	6:09:13 PM	Main Vac valve closed
2/16/2012	6:09:13 PM	Bypass valve closed
2/16/2012	6:09:13 PM	Bubbler valve closed
2/16/2012	6:09:13 PM	Helium MFC set to  0.000000
2/16/2012	6:09:13 PM	H2 MFC set to  0.000000
2/16/2012	6:09:13 PM	BCl3 MFC set to  0.000000
2/16/2012	6:09:13 PM	PH3 MFC set to  0.000000
2/16/2012	6:09:13 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:09:13 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:09:13 PM	Tube furnace set to 0
2/16/2012	6:09:14 PM	Run finished at 6:09 PM
2/16/2012	6:09:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	6:14:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	6:14:36 PM	Recipe started at 6:14 PM
2/16/2012	6:14:36 PM	Helium valve closed
2/16/2012	6:14:36 PM	H2 valve closed
2/16/2012	6:14:36 PM	BCl3 valve closed
2/16/2012	6:14:36 PM	PH3 valve closed
2/16/2012	6:14:36 PM	SiCl4 pre valve closed
2/16/2012	6:14:36 PM	SiCl4 post valve closed
2/16/2012	6:14:36 PM	Main Vac valve closed
2/16/2012	6:14:36 PM	Bubbler valve closed
2/16/2012	6:14:36 PM	Bypass valve opened
2/16/2012	6:14:36 PM	Helium MFC set to  0.000000
2/16/2012	6:14:36 PM	H2 MFC set to  0.000000
2/16/2012	6:14:36 PM	BCl3 MFC set to  0.000000
2/16/2012	6:14:36 PM	PH3 MFC set to  0.000000
2/16/2012	6:14:36 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:14:36 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:14:36 PM	Tube furnace set to 0
2/16/2012	6:15:38 PM	Helium valve closed
2/16/2012	6:15:38 PM	H2 valve closed
2/16/2012	6:15:38 PM	BCl3 valve closed
2/16/2012	6:15:38 PM	PH3 valve closed
2/16/2012	6:15:38 PM	SiCl4 pre valve closed
2/16/2012	6:15:38 PM	SiCl4 post valve closed
2/16/2012	6:15:38 PM	Main Vac valve closed
2/16/2012	6:15:38 PM	Bubbler valve closed
2/16/2012	6:15:38 PM	Bypass valve opened
2/16/2012	6:15:38 PM	Helium MFC set to  0.000000
2/16/2012	6:15:38 PM	H2 MFC set to  0.000000
2/16/2012	6:15:38 PM	BCl3 MFC set to  0.000000
2/16/2012	6:15:38 PM	PH3 MFC set to  0.000000
2/16/2012	6:15:38 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:15:38 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:15:38 PM	Tube furnace set to 0
2/16/2012	6:16:38 PM	Helium valve closed
2/16/2012	6:16:38 PM	H2 valve closed
2/16/2012	6:16:38 PM	BCl3 valve closed
2/16/2012	6:16:38 PM	PH3 valve closed
2/16/2012	6:16:38 PM	SiCl4 pre valve closed
2/16/2012	6:16:38 PM	SiCl4 post valve closed
2/16/2012	6:16:38 PM	Bypass valve closed
2/16/2012	6:16:38 PM	Bubbler valve closed
2/16/2012	6:16:38 PM	Main Vac valve opened
2/16/2012	6:16:38 PM	Helium MFC set to  0.000000
2/16/2012	6:16:38 PM	H2 MFC set to  0.000000
2/16/2012	6:16:38 PM	BCl3 MFC set to  0.000000
2/16/2012	6:16:38 PM	PH3 MFC set to  0.000000
2/16/2012	6:16:38 PM	SiCl4 MFC set to  0.000000
2/16/2012	6:16:38 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	6:16:38 PM	Tube furnace set to 0
2/16/2012	6:16:39 PM	Run finished at 6:16 PM
2/16/2012	6:16:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	7:49:30 PM	Main Vac valve closed
2/16/2012	7:49:44 PM	Main Vac valve opened
2/16/2012	7:50:06 PM	Recipe started at 7:50 PM
2/16/2012	7:50:06 PM	Helium valve closed
2/16/2012	7:50:06 PM	H2 valve closed
2/16/2012	7:50:06 PM	BCl3 valve closed
2/16/2012	7:50:06 PM	PH3 valve closed
2/16/2012	7:50:06 PM	SiCl4 pre valve closed
2/16/2012	7:50:06 PM	SiCl4 post valve closed
2/16/2012	7:50:06 PM	Main Vac valve closed
2/16/2012	7:50:06 PM	Bypass valve closed
2/16/2012	7:50:06 PM	Bubbler valve closed
2/16/2012	7:50:06 PM	Helium MFC set to  0.000000
2/16/2012	7:50:06 PM	H2 MFC set to  0.000000
2/16/2012	7:50:06 PM	BCl3 MFC set to  0.000000
2/16/2012	7:50:06 PM	PH3 MFC set to  0.000000
2/16/2012	7:50:06 PM	SiCl4 MFC set to  0.000000
2/16/2012	7:50:06 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	7:50:07 PM	Tube furnace set to 0
2/16/2012	7:50:10 PM	Helium valve closed
2/16/2012	7:50:10 PM	BCl3 valve closed
2/16/2012	7:50:10 PM	PH3 valve closed
2/16/2012	7:50:10 PM	SiCl4 pre valve closed
2/16/2012	7:50:10 PM	SiCl4 post valve closed
2/16/2012	7:50:10 PM	Main Vac valve closed
2/16/2012	7:50:10 PM	Bypass valve closed
2/16/2012	7:50:10 PM	Bubbler valve closed
2/16/2012	7:50:10 PM	H2 valve opened
2/16/2012	7:50:10 PM	Helium MFC set to  0.000000
2/16/2012	7:50:10 PM	H2 MFC set to  500.000000
2/16/2012	7:50:10 PM	BCl3 MFC set to  0.000000
2/16/2012	7:50:10 PM	PH3 MFC set to  0.000000
2/16/2012	7:50:10 PM	SiCl4 MFC set to  0.000000
2/16/2012	7:50:10 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	7:50:10 PM	Tube furnace set to 0
2/16/2012	7:51:15 PM	Helium valve closed
2/16/2012	7:51:15 PM	BCl3 valve closed
2/16/2012	7:51:15 PM	PH3 valve closed
2/16/2012	7:51:15 PM	SiCl4 pre valve closed
2/16/2012	7:51:15 PM	SiCl4 post valve closed
2/16/2012	7:51:15 PM	Main Vac valve closed
2/16/2012	7:51:15 PM	Bypass valve closed
2/16/2012	7:51:15 PM	H2 valve opened
2/16/2012	7:51:15 PM	Bubbler valve opened
2/16/2012	7:51:15 PM	Helium MFC set to  0.000000
2/16/2012	7:51:15 PM	H2 MFC set to  500.000000
2/16/2012	7:51:15 PM	BCl3 MFC set to  0.000000
2/16/2012	7:51:15 PM	PH3 MFC set to  0.000000
2/16/2012	7:51:15 PM	SiCl4 MFC set to  0.000000
2/16/2012	7:51:15 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	7:51:15 PM	Tube furnace set to 0
2/16/2012	7:51:17 PM	Helium valve closed
2/16/2012	7:51:17 PM	BCl3 valve closed
2/16/2012	7:51:17 PM	PH3 valve closed
2/16/2012	7:51:17 PM	SiCl4 pre valve closed
2/16/2012	7:51:17 PM	SiCl4 post valve closed
2/16/2012	7:51:17 PM	Main Vac valve closed
2/16/2012	7:51:17 PM	Bypass valve closed
2/16/2012	7:51:17 PM	H2 valve opened
2/16/2012	7:51:17 PM	Bubbler valve opened
2/16/2012	7:51:17 PM	Helium MFC set to  0.000000
2/16/2012	7:51:17 PM	H2 MFC set to  500.000000
2/16/2012	7:51:17 PM	BCl3 MFC set to  0.000000
2/16/2012	7:51:17 PM	PH3 MFC set to  0.000000
2/16/2012	7:51:17 PM	SiCl4 MFC set to  0.000000
2/16/2012	7:51:17 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	7:51:17 PM	Tube furnace set to 1000
2/16/2012	8:16:17 PM	Helium valve closed
2/16/2012	8:16:17 PM	PH3 valve closed
2/16/2012	8:16:17 PM	Main Vac valve closed
2/16/2012	8:16:17 PM	Bypass valve closed
2/16/2012	8:16:17 PM	H2 valve opened
2/16/2012	8:16:17 PM	BCl3 valve opened
2/16/2012	8:16:17 PM	SiCl4 pre valve opened
2/16/2012	8:16:17 PM	SiCl4 post valve opened
2/16/2012	8:16:17 PM	Bubbler valve opened
2/16/2012	8:16:17 PM	Helium MFC set to  0.000000
2/16/2012	8:16:17 PM	H2 MFC set to  450.000000
2/16/2012	8:16:17 PM	BCl3 MFC set to  1.500000
2/16/2012	8:16:17 PM	PH3 MFC set to  0.000000
2/16/2012	8:16:17 PM	SiCl4 MFC set to  50.000000
2/16/2012	8:16:17 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	8:16:17 PM	Tube furnace set to 1000
2/16/2012	8:34:17 PM	Helium valve closed
2/16/2012	8:34:17 PM	BCl3 valve closed
2/16/2012	8:34:17 PM	PH3 valve closed
2/16/2012	8:34:17 PM	SiCl4 pre valve closed
2/16/2012	8:34:17 PM	SiCl4 post valve closed
2/16/2012	8:34:17 PM	Main Vac valve closed
2/16/2012	8:34:17 PM	Bypass valve closed
2/16/2012	8:34:17 PM	H2 valve opened
2/16/2012	8:34:17 PM	Bubbler valve opened
2/16/2012	8:34:17 PM	Helium MFC set to  0.000000
2/16/2012	8:34:17 PM	H2 MFC set to  500.000000
2/16/2012	8:34:17 PM	BCl3 MFC set to  0.000000
2/16/2012	8:34:17 PM	PH3 MFC set to  0.000000
2/16/2012	8:34:17 PM	SiCl4 MFC set to  0.000000
2/16/2012	8:34:17 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	8:34:17 PM	Tube furnace set to 750
2/16/2012	8:49:17 PM	H2 valve closed
2/16/2012	8:49:17 PM	BCl3 valve closed
2/16/2012	8:49:17 PM	PH3 valve closed
2/16/2012	8:49:17 PM	SiCl4 pre valve closed
2/16/2012	8:49:17 PM	SiCl4 post valve closed
2/16/2012	8:49:17 PM	Main Vac valve closed
2/16/2012	8:49:17 PM	Bypass valve closed
2/16/2012	8:49:17 PM	Helium valve opened
2/16/2012	8:49:17 PM	Bubbler valve opened
2/16/2012	8:49:17 PM	Helium MFC set to  500.000000
2/16/2012	8:49:17 PM	H2 MFC set to  0.000000
2/16/2012	8:49:17 PM	BCl3 MFC set to  0.000000
2/16/2012	8:49:17 PM	PH3 MFC set to  0.000000
2/16/2012	8:49:17 PM	SiCl4 MFC set to  0.000000
2/16/2012	8:49:17 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	8:49:17 PM	Tube furnace set to 0
2/16/2012	9:09:17 PM	Helium valve closed
2/16/2012	9:09:17 PM	H2 valve closed
2/16/2012	9:09:17 PM	BCl3 valve closed
2/16/2012	9:09:17 PM	PH3 valve closed
2/16/2012	9:09:17 PM	SiCl4 pre valve closed
2/16/2012	9:09:17 PM	SiCl4 post valve closed
2/16/2012	9:09:17 PM	Main Vac valve closed
2/16/2012	9:09:17 PM	Bypass valve closed
2/16/2012	9:09:17 PM	Bubbler valve closed
2/16/2012	9:09:17 PM	Helium MFC set to  0.000000
2/16/2012	9:09:17 PM	H2 MFC set to  0.000000
2/16/2012	9:09:17 PM	BCl3 MFC set to  0.000000
2/16/2012	9:09:17 PM	PH3 MFC set to  0.000000
2/16/2012	9:09:17 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:09:17 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:09:17 PM	Tube furnace set to 0
2/16/2012	9:27:29 PM	Run aborted at 9:27 PM
2/16/2012	9:27:29 PM	Helium valve closed
2/16/2012	9:27:29 PM	H2 valve closed
2/16/2012	9:27:29 PM	BCl3 valve closed
2/16/2012	9:27:29 PM	PH3 valve closed
2/16/2012	9:27:29 PM	SiCl4 pre valve closed
2/16/2012	9:27:29 PM	SiCl4 post valve closed
2/16/2012	9:27:29 PM	Bypass valve closed
2/16/2012	9:27:29 PM	Main Vac valve closed
2/16/2012	9:27:29 PM	Bubbler valve closed
2/16/2012	9:27:29 PM	Helium MFC set to  0.000000
2/16/2012	9:27:29 PM	H2 MFC set to  0.000000
2/16/2012	9:27:29 PM	BCl3 MFC set to  0.000000
2/16/2012	9:27:29 PM	PH3 MFC set to  0.000000
2/16/2012	9:27:29 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:27:29 PM	Tube furnace set to 0
2/16/2012	9:27:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	9:27:37 PM	Recipe started at 9:27 PM
2/16/2012	9:27:37 PM	Helium valve closed
2/16/2012	9:27:37 PM	H2 valve closed
2/16/2012	9:27:37 PM	BCl3 valve closed
2/16/2012	9:27:37 PM	PH3 valve closed
2/16/2012	9:27:37 PM	SiCl4 pre valve closed
2/16/2012	9:27:37 PM	SiCl4 post valve closed
2/16/2012	9:27:37 PM	Main Vac valve closed
2/16/2012	9:27:37 PM	Bypass valve closed
2/16/2012	9:27:37 PM	Bubbler valve closed
2/16/2012	9:27:37 PM	Helium MFC set to  0.000000
2/16/2012	9:27:37 PM	H2 MFC set to  0.000000
2/16/2012	9:27:37 PM	BCl3 MFC set to  0.000000
2/16/2012	9:27:37 PM	PH3 MFC set to  0.000000
2/16/2012	9:27:37 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:27:37 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:27:37 PM	Tube furnace set to 0
2/16/2012	9:27:41 PM	H2 valve closed
2/16/2012	9:27:41 PM	BCl3 valve closed
2/16/2012	9:27:41 PM	PH3 valve closed
2/16/2012	9:27:41 PM	SiCl4 pre valve closed
2/16/2012	9:27:41 PM	SiCl4 post valve closed
2/16/2012	9:27:41 PM	Main Vac valve closed
2/16/2012	9:27:41 PM	Bypass valve closed
2/16/2012	9:27:41 PM	Bubbler valve closed
2/16/2012	9:27:41 PM	Helium valve opened
2/16/2012	9:27:41 PM	Helium MFC set to  500.000000
2/16/2012	9:27:41 PM	H2 MFC set to  0.000000
2/16/2012	9:27:41 PM	BCl3 MFC set to  0.000000
2/16/2012	9:27:41 PM	PH3 MFC set to  0.000000
2/16/2012	9:27:41 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:27:41 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:27:41 PM	Tube furnace set to 0
2/16/2012	9:27:41 PM	Helium valve closed
2/16/2012	9:27:41 PM	H2 valve closed
2/16/2012	9:27:41 PM	BCl3 valve closed
2/16/2012	9:27:41 PM	PH3 valve closed
2/16/2012	9:27:41 PM	SiCl4 pre valve closed
2/16/2012	9:27:41 PM	SiCl4 post valve closed
2/16/2012	9:27:41 PM	Main Vac valve closed
2/16/2012	9:27:41 PM	Bypass valve closed
2/16/2012	9:27:41 PM	Bubbler valve closed
2/16/2012	9:27:41 PM	Helium MFC set to  0.000000
2/16/2012	9:27:41 PM	H2 MFC set to  0.000000
2/16/2012	9:27:41 PM	BCl3 MFC set to  0.000000
2/16/2012	9:27:41 PM	PH3 MFC set to  0.000000
2/16/2012	9:27:41 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:27:41 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:27:41 PM	Tube furnace set to 0
2/16/2012	9:27:42 PM	Run finished at 9:27 PM
2/16/2012	9:27:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	9:34:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	9:34:05 PM	Recipe started at 9:34 PM
2/16/2012	9:34:05 PM	Helium valve closed
2/16/2012	9:34:05 PM	H2 valve closed
2/16/2012	9:34:05 PM	BCl3 valve closed
2/16/2012	9:34:05 PM	PH3 valve closed
2/16/2012	9:34:05 PM	SiCl4 pre valve closed
2/16/2012	9:34:05 PM	SiCl4 post valve closed
2/16/2012	9:34:05 PM	Main Vac valve closed
2/16/2012	9:34:05 PM	Bypass valve closed
2/16/2012	9:34:05 PM	Bubbler valve closed
2/16/2012	9:34:05 PM	Helium MFC set to  0.000000
2/16/2012	9:34:05 PM	H2 MFC set to  0.000000
2/16/2012	9:34:05 PM	BCl3 MFC set to  0.000000
2/16/2012	9:34:05 PM	PH3 MFC set to  0.000000
2/16/2012	9:34:05 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:34:05 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:34:05 PM	Tube furnace set to 0
2/16/2012	9:34:08 PM	H2 valve closed
2/16/2012	9:34:08 PM	BCl3 valve closed
2/16/2012	9:34:08 PM	PH3 valve closed
2/16/2012	9:34:08 PM	SiCl4 pre valve closed
2/16/2012	9:34:08 PM	SiCl4 post valve closed
2/16/2012	9:34:08 PM	Main Vac valve closed
2/16/2012	9:34:08 PM	Bypass valve closed
2/16/2012	9:34:08 PM	Bubbler valve closed
2/16/2012	9:34:08 PM	Helium valve opened
2/16/2012	9:34:08 PM	Helium MFC set to  500.000000
2/16/2012	9:34:08 PM	H2 MFC set to  0.000000
2/16/2012	9:34:08 PM	BCl3 MFC set to  0.000000
2/16/2012	9:34:08 PM	PH3 MFC set to  0.000000
2/16/2012	9:34:08 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:34:08 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:34:08 PM	Tube furnace set to 0
2/16/2012	9:34:12 PM	Helium valve closed
2/16/2012	9:34:12 PM	H2 valve closed
2/16/2012	9:34:12 PM	BCl3 valve closed
2/16/2012	9:34:12 PM	PH3 valve closed
2/16/2012	9:34:12 PM	SiCl4 pre valve closed
2/16/2012	9:34:12 PM	SiCl4 post valve closed
2/16/2012	9:34:12 PM	Main Vac valve closed
2/16/2012	9:34:12 PM	Bypass valve closed
2/16/2012	9:34:12 PM	Bubbler valve closed
2/16/2012	9:34:12 PM	Helium MFC set to  0.000000
2/16/2012	9:34:12 PM	H2 MFC set to  0.000000
2/16/2012	9:34:12 PM	BCl3 MFC set to  0.000000
2/16/2012	9:34:12 PM	PH3 MFC set to  0.000000
2/16/2012	9:34:12 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:34:12 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:34:12 PM	Tube furnace set to 0
2/16/2012	9:34:13 PM	Run finished at 9:34 PM
2/16/2012	9:34:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2012	9:38:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	9:38:45 PM	Recipe started at 9:38 PM
2/16/2012	9:38:45 PM	Helium valve closed
2/16/2012	9:38:45 PM	H2 valve closed
2/16/2012	9:38:45 PM	BCl3 valve closed
2/16/2012	9:38:45 PM	PH3 valve closed
2/16/2012	9:38:45 PM	SiCl4 pre valve closed
2/16/2012	9:38:45 PM	SiCl4 post valve closed
2/16/2012	9:38:45 PM	Main Vac valve closed
2/16/2012	9:38:45 PM	Bubbler valve closed
2/16/2012	9:38:45 PM	Bypass valve opened
2/16/2012	9:38:45 PM	Helium MFC set to  0.000000
2/16/2012	9:38:45 PM	H2 MFC set to  0.000000
2/16/2012	9:38:45 PM	BCl3 MFC set to  0.000000
2/16/2012	9:38:45 PM	PH3 MFC set to  0.000000
2/16/2012	9:38:45 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:38:45 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:38:46 PM	Tube furnace set to 0
2/16/2012	9:39:46 PM	Helium valve closed
2/16/2012	9:39:46 PM	H2 valve closed
2/16/2012	9:39:46 PM	BCl3 valve closed
2/16/2012	9:39:46 PM	PH3 valve closed
2/16/2012	9:39:46 PM	SiCl4 pre valve closed
2/16/2012	9:39:46 PM	SiCl4 post valve closed
2/16/2012	9:39:46 PM	Main Vac valve closed
2/16/2012	9:39:46 PM	Bubbler valve closed
2/16/2012	9:39:46 PM	Bypass valve opened
2/16/2012	9:39:46 PM	Helium MFC set to  0.000000
2/16/2012	9:39:46 PM	H2 MFC set to  0.000000
2/16/2012	9:39:46 PM	BCl3 MFC set to  0.000000
2/16/2012	9:39:46 PM	PH3 MFC set to  0.000000
2/16/2012	9:39:46 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:39:46 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:39:46 PM	Tube furnace set to 0
2/16/2012	9:40:46 PM	Helium valve closed
2/16/2012	9:40:46 PM	H2 valve closed
2/16/2012	9:40:46 PM	BCl3 valve closed
2/16/2012	9:40:46 PM	PH3 valve closed
2/16/2012	9:40:46 PM	SiCl4 pre valve closed
2/16/2012	9:40:46 PM	SiCl4 post valve closed
2/16/2012	9:40:46 PM	Bypass valve closed
2/16/2012	9:40:46 PM	Bubbler valve closed
2/16/2012	9:40:46 PM	Main Vac valve opened
2/16/2012	9:40:46 PM	Helium MFC set to  0.000000
2/16/2012	9:40:46 PM	H2 MFC set to  0.000000
2/16/2012	9:40:46 PM	BCl3 MFC set to  0.000000
2/16/2012	9:40:46 PM	PH3 MFC set to  0.000000
2/16/2012	9:40:46 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:40:46 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:40:46 PM	Tube furnace set to 0
2/16/2012	9:40:47 PM	Run finished at 9:40 PM
2/16/2012	9:40:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2012	9:41:50 PM	Recipe started at 9:41 PM
2/16/2012	9:41:50 PM	Helium valve closed
2/16/2012	9:41:50 PM	H2 valve closed
2/16/2012	9:41:50 PM	BCl3 valve closed
2/16/2012	9:41:50 PM	PH3 valve closed
2/16/2012	9:41:50 PM	SiCl4 pre valve closed
2/16/2012	9:41:50 PM	SiCl4 post valve closed
2/16/2012	9:41:50 PM	Bypass valve closed
2/16/2012	9:41:50 PM	Bubbler valve closed
2/16/2012	9:41:50 PM	Main Vac valve opened
2/16/2012	9:41:50 PM	Helium MFC set to  0.000000
2/16/2012	9:41:50 PM	H2 MFC set to  0.000000
2/16/2012	9:41:50 PM	BCl3 MFC set to  0.000000
2/16/2012	9:41:50 PM	PH3 MFC set to  0.000000
2/16/2012	9:41:50 PM	SiCl4 MFC set to  0.000000
2/16/2012	9:41:50 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	9:41:50 PM	Tube furnace set to 0
2/16/2012	11:11:50 PM	Helium valve closed
2/16/2012	11:11:50 PM	H2 valve closed
2/16/2012	11:11:50 PM	BCl3 valve closed
2/16/2012	11:11:50 PM	PH3 valve closed
2/16/2012	11:11:50 PM	SiCl4 pre valve closed
2/16/2012	11:11:50 PM	SiCl4 post valve closed
2/16/2012	11:11:50 PM	Main Vac valve closed
2/16/2012	11:11:50 PM	Bypass valve closed
2/16/2012	11:11:50 PM	Bubbler valve closed
2/16/2012	11:11:50 PM	Helium MFC set to  0.000000
2/16/2012	11:11:50 PM	H2 MFC set to  0.000000
2/16/2012	11:11:50 PM	BCl3 MFC set to  0.000000
2/16/2012	11:11:50 PM	PH3 MFC set to  0.000000
2/16/2012	11:11:50 PM	SiCl4 MFC set to  0.000000
2/16/2012	11:11:50 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:11:51 PM	Tube furnace set to 0
2/16/2012	11:11:54 PM	Helium valve closed
2/16/2012	11:11:54 PM	BCl3 valve closed
2/16/2012	11:11:54 PM	PH3 valve closed
2/16/2012	11:11:54 PM	SiCl4 pre valve closed
2/16/2012	11:11:54 PM	SiCl4 post valve closed
2/16/2012	11:11:54 PM	Main Vac valve closed
2/16/2012	11:11:54 PM	Bypass valve closed
2/16/2012	11:11:54 PM	Bubbler valve closed
2/16/2012	11:11:54 PM	H2 valve opened
2/16/2012	11:11:54 PM	Helium MFC set to  0.000000
2/16/2012	11:11:54 PM	H2 MFC set to  500.000000
2/16/2012	11:11:54 PM	BCl3 MFC set to  0.000000
2/16/2012	11:11:54 PM	PH3 MFC set to  0.000000
2/16/2012	11:11:54 PM	SiCl4 MFC set to  0.000000
2/16/2012	11:11:54 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:11:54 PM	Tube furnace set to 0
2/16/2012	11:12:59 PM	Helium valve closed
2/16/2012	11:12:59 PM	BCl3 valve closed
2/16/2012	11:12:59 PM	PH3 valve closed
2/16/2012	11:13:00 PM	SiCl4 pre valve closed
2/16/2012	11:13:00 PM	SiCl4 post valve closed
2/16/2012	11:13:00 PM	Main Vac valve closed
2/16/2012	11:13:00 PM	Bypass valve closed
2/16/2012	11:13:00 PM	H2 valve opened
2/16/2012	11:13:00 PM	Bubbler valve opened
2/16/2012	11:13:00 PM	Helium MFC set to  0.000000
2/16/2012	11:13:00 PM	H2 MFC set to  500.000000
2/16/2012	11:13:00 PM	BCl3 MFC set to  0.000000
2/16/2012	11:13:00 PM	PH3 MFC set to  0.000000
2/16/2012	11:13:00 PM	SiCl4 MFC set to  0.000000
2/16/2012	11:13:00 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:13:00 PM	Tube furnace set to 0
2/16/2012	11:13:01 PM	Helium valve closed
2/16/2012	11:13:01 PM	BCl3 valve closed
2/16/2012	11:13:01 PM	PH3 valve closed
2/16/2012	11:13:01 PM	SiCl4 pre valve closed
2/16/2012	11:13:01 PM	SiCl4 post valve closed
2/16/2012	11:13:01 PM	Main Vac valve closed
2/16/2012	11:13:01 PM	Bypass valve closed
2/16/2012	11:13:01 PM	H2 valve opened
2/16/2012	11:13:01 PM	Bubbler valve opened
2/16/2012	11:13:01 PM	Helium MFC set to  0.000000
2/16/2012	11:13:01 PM	H2 MFC set to  500.000000
2/16/2012	11:13:01 PM	BCl3 MFC set to  0.000000
2/16/2012	11:13:01 PM	PH3 MFC set to  0.000000
2/16/2012	11:13:01 PM	SiCl4 MFC set to  0.000000
2/16/2012	11:13:01 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:13:01 PM	Tube furnace set to 1000
2/16/2012	11:38:01 PM	Helium valve closed
2/16/2012	11:38:01 PM	PH3 valve closed
2/16/2012	11:38:01 PM	Main Vac valve closed
2/16/2012	11:38:01 PM	Bypass valve closed
2/16/2012	11:38:01 PM	H2 valve opened
2/16/2012	11:38:01 PM	BCl3 valve opened
2/16/2012	11:38:01 PM	SiCl4 pre valve opened
2/16/2012	11:38:01 PM	SiCl4 post valve opened
2/16/2012	11:38:01 PM	Bubbler valve opened
2/16/2012	11:38:01 PM	Helium MFC set to  0.000000
2/16/2012	11:38:01 PM	H2 MFC set to  450.000000
2/16/2012	11:38:01 PM	BCl3 MFC set to  1.500000
2/16/2012	11:38:01 PM	PH3 MFC set to  0.000000
2/16/2012	11:38:01 PM	SiCl4 MFC set to  50.000000
2/16/2012	11:38:01 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:38:01 PM	Tube furnace set to 1000
2/16/2012	11:56:01 PM	Helium valve closed
2/16/2012	11:56:01 PM	BCl3 valve closed
2/16/2012	11:56:01 PM	PH3 valve closed
2/16/2012	11:56:01 PM	SiCl4 pre valve closed
2/16/2012	11:56:01 PM	SiCl4 post valve closed
2/16/2012	11:56:01 PM	Main Vac valve closed
2/16/2012	11:56:01 PM	Bypass valve closed
2/16/2012	11:56:01 PM	H2 valve opened
2/16/2012	11:56:01 PM	Bubbler valve opened
2/16/2012	11:56:01 PM	Helium MFC set to  0.000000
2/16/2012	11:56:01 PM	H2 MFC set to  500.000000
2/16/2012	11:56:01 PM	BCl3 MFC set to  0.000000
2/16/2012	11:56:01 PM	PH3 MFC set to  0.000000
2/16/2012	11:56:01 PM	SiCl4 MFC set to  0.000000
2/16/2012	11:56:01 PM	Bypass solenoid MFC set to  0.000000
2/16/2012	11:56:01 PM	Tube furnace set to 750
